Ultra High Purity Valves

Filter by

No filters selected

Mounting Type

Application

Maximum Operating Pressure

Flow Rate

Media

Get your Parker account Today!

Create one account to manage everything you do with Parker, from your shopping preferences to your application access.

Ultra High Purity Valves

Ultra High Purity Valves

Parker has a comprehensive range of ultra high purity valves (UHP) that are suitable for use within a wide variety of markets. Our UHP valves offer a selection of valve types and functions to suit the needs of your applications and are designed to offer excellent leak integrity, high cycle life and low particle generation. With the capability of working with a wide variety of media, our ultra high purity valves are able to meet nearly every design requirement. The range includes electro-pneumatic manual and air-actuated diaphragm valves that are capable of operating under a range of temperatures and pressures making them suitable for extreme conditions.

The 930 Series provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor applications needing flow capacities up to 0.30 Cv and operating pressures up to 300 psig.
Viewing 10 of 71
Show More

The SM930 Series surface mount valve provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor tool applications requiring flow capacities up to 0.30 Cv and operating pressures up to 250 psig
Viewing 10 of 11
Show More

The 955 Series provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor applications needing flow capacities up to 0.55 Cv and operating pressures up to 250 psig.
Viewing 10 of 48
Show More

The CV-1 Series Check Valve has a machined PTFE spring that allows for low cracking pressure operation and minimal back pressure for resealing. It offers exceptional corrosion resistance and is designed for use in ultra-high purity applications.
Viewing 10 of 1
Show More

The 945 Series Diaphragm Valve provides excellent reliability and leak integrity, making it ideal for use in UHP applications. Available in configurations with flow capacities up to 0.25 Cv and working pressures up to 3,500 psig.
Viewing 10 of 38
Show More

The PV-20 Series PTFE Slurry Valve offers exceptional sealing of aggressive chemicals and abrasive slurry media. The valve minimizes particle generation and is designed for use in semiconductor manufacturing and clean-area applications.
Viewing 10 of 20
Show More

The 930Y Series combines two valves into a single body simplifying the integration of a purge line into a gas system. Ideal for (ultra-high purity) semiconductor applications needing flow capacities up to 0.30 Cv and operating pressures up to 300 psig.
Viewing 10 of 99
Show More

The MV-20 Series PTFE Slurry Valve offers exceptional sealing of aggressive chemicals and abrasive slurry media. The valve minimizes particle generation and is designed for use in semiconductor manufacturing and clean-area applications.
Viewing 10 of 7
Show More

The 945Y Series combines two valves into a single body simplifying the integration of a purge line into a gas system. Ideal for (ultra-high purity) semiconductor applications needing flow capacities up to 0.25 Cv and operating pressures up to 3500 psig.
Viewing 10 of 65
Show More

The 935 Series valve is intended for use in ultra-high purity gas distribution systems. It provides superior control of gases under high-flow, low-pressure conditions, where high leak integrity and absolute purity is essential.
Viewing 10 of 24
Show More

The 935A and 935T Series is a ½ inch valve with a body that incorporates a flow through tube connection up to 2 inches diameter. This design simplifies the integration of drop line isolation valves into lateral gas distribution systems.
Viewing 10 of
Show More

The 955Y Series Diaphragm Valve (Y block body) combines two high flow capacity valves into a single compact body simplifying the integration of a purge system into a gas manifold while improving the effectiveness of the purge process.
Viewing 10 of 65
Show More

The F9 Series is a high purity, all welded check valve offering high Cv up to 0.90 in a small footprint to conserve much needed panel space. The F9 is ideally suited for semiconductor fab applications, VMB/VMP, and gas cabinet manufacturers.
Viewing 10 of
Show More

The 970 Series Diaphragm Valve offers exceptional cycle life, leak integrity, and cleanliness. It can be manually or air-operated and is ideally suited for use in high-flow UHP semiconductor applications.
Viewing 10 of 20
Show More

The RV Series is a PTFE relief valve that’s ideally suited for ultra-high purity semiconductor, DI water, and aggressive chemical applications. The valve is highly compact and can be adjusted in the field to provide safe and reliable pressure relief.
Viewing 10 of 10
Show More

The 870 Series Diaphragm Valve offers long life and exceptional leak integrity. It can be manually or air-operated and is ideally suited for use in high-flow, high-purity applications (maximum flow capacity = 0.70 Cv).
Viewing 10 of 15
Show More

The MV-1 Series PTFE Manual Stop Cock Valve offers high cycle life and excellent resistance to corrosion. It is available in a variety of sizes and flow capacities and is ideal for use in highly aggressive liquid applications (up to 60 psig).
Viewing 10 of 27
Show More

The Parker VR7 Series Pressure Relief Valve is designed to ensure safety and protection of downstream process equipment by venting excess pressure from a regulator should a minor seat leak occur. It is available in stainless steel.
Viewing 10 of
Show More

The MV-6 Series PTFE Manual Ball Valve offers high cycle life and exceptional resistance to corrosion. It is designed full port for minimal flow restriction and is ideal for use in aggressive chemical applications (up to 120 psig).
Viewing 10 of 3
Show More

The SM955 Series Diaphragm Valve is available with a variety of manual operators and air-operated actuators. It provides excellent reliability and leak integrity making it ideal for use in UHP semiconductor modular surface-mount system applications.
Viewing 10 of
Show More

The 700 Series High-Flow Bulk Facility Valve is intended for use in ultra-high purity gas distribution systems. It features a unique lightweight design that reduces installation costs and can accommodate connection sizes up to 6-inches.
Viewing 10 of
Show More

Parker Hannifin Corporation's Veriflo Division presents the 500 Series Manual & Pneumatic Operated Bellows Valves. These valves are designed with the industry's leading straight-through full flow.
Viewing 10 of
Show More

The CV-32 Series PTFE High-flow Check Valve provides low cracking pressure and high integrity sealing for back flow protection. It is ideally suited for bulk chemical delivery systems used in ultra-high purity semiconductor manufacturing applications.
Viewing 10 of 1
Show More

The BDV Series is a "positive retraction" diaphragm valve that enables precise control of gas and liquid distribution in semiconductor manufacturing processes.
Viewing 10 of 15
Show More
Close [ x ]
Full Screen
687466
687466