The Parker 955Y Series stainless steel body diaphragm Y-valve offers excellent leak integrity, high cycle life, and low particle generation making it ideal for use in UHP semiconductor applications.
The 955Y Series design has no threads or springs in contact with the process fluid which minimizes particle generation and entrapment for reduced process contamination essential to semiconductor applications. The valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance free service life. The 955Y Series wetted components are fabricated from specialty metals to provide exceptional corrosion resistance and leak integrity. The body is internally electropolished Vericlean™ 316L stainless steel. Vericlean™ is Parker’s proprietary UHP grade stainless steel. The diaphragm is a high strength Cobalt based alloy. The 955Y series also offers seat materials PCTFE, PEEK® and Vespel® to allow the 955Y to be compatible with a wide range of process fluids. These materials combined with the 955Y Series exacting design features afford the 955Y Series extreme corrosion resistance and maximum cycle life at inlet pressures up to 250 psig.
The 955Y Series is offered in several flow path configurations to accommodate up-stream, down-stream, and common path purging applications. Internal dead leg volumes are minimized to improve purging effectiveness. The series air-actuated valves can be configured to provide open-close position indication with either a limit switch or proximity switch. For other body configurations refer to the 955 (single valve body) and the SM955 (surface-mount).
The internal (seats) seals and metal external seals on all 955Y Series valves are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.
Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial
Features/Benefits:
• 5 microinch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and threadless design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 250 psig (manual and NC air-operated) and 125 psig (NO air-operated)
• Internal leak rate: ≤ 4 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• 75 psig nominal AOP actuation pressure
Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)
VeriClean™ is a trademark of Parker Hannifin Corporation
Vespel® is a registered trademark of DuPont Performance Elastomers L.L.C.
PEEK™ is a trademark of Victrex plc.
