Shut Off Valves

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Shut Off Valves

Shut Off Valves

Parker's broad selection of shut-off valves are well suited for semiconductor and comparable applications requiring corrosion-resistance and precise flow control. Our industry-leading range of shut-off valves offer unrivalled performance and has the capability to work with a variety of different industrial media. This extensive range enables us to provide gas shut-off valves in different configurations and sizes to suit individual application requirements. They are also easy to install and are suitable for use within a wide variety of applications across many of the major industrial markets.

The 930 Series provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor applications needing flow capacities up to 0.30 Cv and operating pressures up to 300 psig.
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UHP Fluoropolymer ultra clean valves are made from PFA and PTFE for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries.
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The SM930 Series surface mount valve provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor tool applications requiring flow capacities up to 0.30 Cv and operating pressures up to 250 psig
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The RS Shut- off/ Expansion Valves were designed and built to maintain reliability both in their seating and back seating functions.
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The SG-1 Series PFA Nitrogen Gun is designed for ultra-high purity semiconductor manufacturing applications. Available with FNPT or Parflare connections. Additional options include a 0.2 or 0.5 micron filter and coiled hose assembly (up to 80 psig).
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The Parker Legris axial valve features a pneumatic actuator and can be controlled pneumatically or electro-pneumatically (with a NAMUR spool valve or solenoid valve) for integration into automated systems. It is available with or without detection.
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Parker's truck valves are a robust, all brass construction with metal-to-metal seats for high heat/fluid compatibility.
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The 955 Series provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor applications needing flow capacities up to 0.55 Cv and operating pressures up to 250 psig.
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The 945 Series Diaphragm Valve provides excellent reliability and leak integrity, making it ideal for use in UHP applications. Available in configurations with flow capacities up to 0.25 Cv and working pressures up to 3,500 psig.
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The PV-20 Series PTFE Slurry Valve offers exceptional sealing of aggressive chemicals and abrasive slurry media. The valve minimizes particle generation and is designed for use in semiconductor manufacturing and clean-area applications.
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The 930Y Series combines two valves into a single body simplifying the integration of a purge line into a gas system. Ideal for (ultra-high purity) semiconductor applications needing flow capacities up to 0.30 Cv and operating pressures up to 300 psig.
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HERL valves are the industry’s standard for rugged, dependable products.
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The MV-20 Series PTFE Slurry Valve offers exceptional sealing of aggressive chemicals and abrasive slurry media. The valve minimizes particle generation and is designed for use in semiconductor manufacturing and clean-area applications.
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The 945Y Series combines two valves into a single body simplifying the integration of a purge line into a gas system. Ideal for (ultra-high purity) semiconductor applications needing flow capacities up to 0.25 Cv and operating pressures up to 3500 psig.
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The MV-13 Series PFA Manual Needle Valve offers excellent leak integrity and exceptional resistance to corrosion. It has a PTFE ferrule and is designed to provide precise flow control in ultra-high purity and aggressive fluid handling applications.
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The 935 Series valve is intended for use in ultra-high purity gas distribution systems. It provides superior control of gases under high-flow, low-pressure conditions, where high leak integrity and absolute purity is essential.
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The PV-10 Series PFA Valve offers high leak integrity and excellent resistance to corrosion. It is available in 2-way or 3-way configurations and is designed for ultra-high purity (UHP) and aggressive fluid applications (up to 80 psig).
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The 935A and 935T Series is a ½ inch valve with a body that incorporates a flow through tube connection up to 2 inches diameter. This design simplifies the integration of drop line isolation valves into lateral gas distribution systems.
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The MV-10 Series PFA Manual Valve offers high leak integrity and excellent resistance to corrosion. It is available in 3-way configurations and is designed for ultra-high purity (UHP) and aggressive fluid applications (up to 80 psig).
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The 955Y Series Diaphragm Valve (Y block body) combines two high flow capacity valves into a single compact body simplifying the integration of a purge system into a gas manifold while improving the effectiveness of the purge process.
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The PV-11 Series PFA Valve offers high leak integrity and excellent resistance to corrosion. It is available in 2-way and 3-way configurations and is designed for ultra-high purity (UHP) and aggressive fluid applications (up to 100 psig).
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The MV-11 Series PFA Valve offers high leak integrity and excellent resistance to corrosion. It is available in 3-way configurations and is designed for ultra-high purity (UHP) and aggressive fluid applications (up to 100 psig).
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The 970 Series Diaphragm Valve offers exceptional cycle life, leak integrity, and cleanliness. It can be manually or air-operated and is ideally suited for use in high-flow UHP semiconductor applications.
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The 870 Series Diaphragm Valve offers long life and exceptional leak integrity. It can be manually or air-operated and is ideally suited for use in high-flow, high-purity applications (maximum flow capacity = 0.70 Cv).
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The MV-1 Series PTFE Manual Stop Cock Valve offers high cycle life and excellent resistance to corrosion. It is available in a variety of sizes and flow capacities and is ideal for use in highly aggressive liquid applications (up to 60 psig).
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