Ultra High Purity Fluoropolymer (PFA) Valves - 22 Series | South Africa

Ultra High Purity Fluoropolymer (PFA) Valves - 22 Series | Product Series

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Ultra High Purity Fluoropolymer (PFA) Valves - 22 Series

Ultra High Purity Fluoropolymer (PFA) Valves - 22 Series

UHP Fluoropolymer ultra clean valves are made from PFA and PTFE for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries.

Technical Specifications

  • Body Material: PFA
  • Diaphragm Material: Modified PTFE
  • Housing Material: PVDF
  • Spring Material: SS, Fluoropolymer Coated
  • Screw Material: SS
  • Maximum Operating Pressure: 80 psig
  • Actuation Pressure: 60 to 100 psig
  • Operating Temperature: 32 to 212 °F, 0 to 100 °C
  • Proof Pressure: 120 psig
  • Burst Pressure: 200 psig
  • Flow Rate: 0.33, 0.82, 2.3, 4.3
Safety Warning

Full Product Description

These new, ultra clean, fluoropolymer, manual and pneumatic valves offer increased flow and provide better seat sealing for enhanced, leak-free performance for greater safety. They are designed to deliver the highest flow in the smallest package available. Computational fluid dynamics software was utilized to maximize the flow through these valves. These ultra clean valves are for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries. Other demanding markets can use these valves for their cleanliness and ability to carry highly corrosive chemicals.

Markets:
• Semiconductor processing
• Chemical Processing
• Analytical Equipment
• Laboratory

Features/Benefits:
• High cycle life in acids and slurry
• Compact footprint with a true lock-out, tag-out design (LOTO)
• Dual point seal provides double the sealing power (patent pending)
• Smooth bore and fully swept path, minimizes particle entrapment areas and prevents stagnation
• 100% leak tested
• Meets SEMI-F57-0301 Standards

Key Applications:
• Chemical Mechanical Polishing (CMP) Slurries
• Ultra high purity processes
• Clear chemistries for semiconductor processes
• Blender systems
• Cleaning systems

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