Ultra High Purity Fluoropolymer (PFA) Valves - 22 Series | Product Series

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Ultra High Purity Fluoropolymer (PFA) Valves - 22 Series

Ultra High Purity Fluoropolymer (PFA) Valves - 22 Series

UHP Fluoropolymer ultra clean valves are made from PFA and PTFE for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries.

Technical Specifications

  • Body Material: PFA
  • Diaphragm Material: Modified PTFE
  • Housing Material: PVDF
  • Spring Material: SS, Fluoropolymer Coated
  • Screw Material: SS
  • Maximum Operating Pressure: 80 psig
  • Actuation Pressure: 60 to 100 psig
  • Operating Temperature: 32 to 212 °F, 0 to 100 °C
  • Proof Pressure: 120 psig
  • Burst Pressure: 200 psig
  • Flow Rate: 0.33, 0.82, 2.3, 4.3
Safety Warning

Full Product Description

These new, ultra clean, fluoropolymer, manual and pneumatic valves offer increased flow and provide better seat sealing for enhanced, leak-free performance for greater safety. They are designed to deliver the highest flow in the smallest package available. Computational fluid dynamics software was utilized to maximize the flow through these valves. These ultra clean valves are for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries. Other demanding markets can use these valves for their cleanliness and ability to carry highly corrosive chemicals.

Markets:
• Semiconductor processing
• Chemical Processing
• Analytical Equipment
• Laboratory

Features/Benefits:
• High cycle life in acids and slurry
• Compact footprint with a true lock-out, tag-out design (LOTO)
• Dual point seal provides double the sealing power (patent pending)
• Smooth bore and fully swept path, minimizes particle entrapment areas and prevents stagnation
• 100% leak tested
• Meets SEMI-F57-0301 Standards

Key Applications:
• Chemical Mechanical Polishing (CMP) Slurries
• Ultra high purity processes
• Clear chemistries for semiconductor processes
• Blender systems
• Cleaning systems

Related Documents

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Products Valve Size (Inch) Material Cover Type Special Options Actuation Housing Connection Thread Size (inch) Connection 1 Style Connection 1 Size Connection 2 Style Connection 2 Size Connection Material
PV2204VN1FL04FL04T 1/4" PVDF None Pneumatic-Normally Closed 10-32 UNF Flare 1/4" Flare 1/4" PFA Nut
PV2204VN1FL04FL04V 1/4" PVDF None Pneumatic-Normally Closed 10-32 UNF Flare 1/4" Flare 1/4" PVDF Nut
PV2204VN1FL06FL06T 3/8" PVDF None Pneumatic-Normally Closed 10-32 UNF Flare 3/8" Flare 3/8" PFA Nut
PV2204VN1FL06FL06V 3/8" PVDF None Pneumatic-Normally Closed 10-32 UNF Flare 3/8" Flare 3/8" PVDF Nut
PV2204VN2FL04FL04T 1/4" PVDF None Pneumatic-Normally Open 10-32 UNF Flare 1/4" Flare 1/4" PFA Nut
PV2204VN2FL04FL04V 1/4" PVDF None Pneumatic-Normally Open 10-32 UNF Flare 1/4" Flare 1/4" PVDF Nut
PV2204VN2FL06FL06T 3/8" PVDF None Pnuematic-Normally Open 10-32 UNF Flare 3/8" Flare 3/8" PFA Nut
PV2204VN2FL06FL06V 3/8" PVDF None Pneumatic-Normally Open 10-32 UNF Flare 3/8" Flare 3/8" PVDF Nut
MV2204VN0FL04FL04T 1/4" PVDF None Manual, 1/4 Turn Loto NA Flare 1/4" Flare 1/4" PFA Nut
MV2204VN0FL04FL04V 1/4" PVDF None Manual, 1/4 Turn Loto NA Flare 1/4" Flare 1/4" PVDF Nut
MV2204VN0FL06FL06T 3/8" PVDF None Manual, 1/4 Turn Loto NA Flare 3/8" Flare 3/8" PFA Nut
MV2204VN0FL06FL06V 3/8" PVDF None Manual, 1/4 Turn Loto NA Flare 3/8" Flare 3/8" PVDF Nut
PV2208VN1FL08FL08T 1/2" PVDF None Pneumatic-Normally Closed 10-32 UNF Flare 1/2" Flare 1/2" PFA Nut
PV2208VN1FL08FL08V 1/2" PVDF None Pneumatic-Normally Closed 10-32 UNF Flare 1/2" Flare 1/2" PVDF Nut
PV2208VN1FL12FL12T 3/4" PVDF None Pneumatic-Normally Closed 10-32 UNF Flare 3/4" Flare 3/4" PFA Nut
PV2208VN1FL12FL12V 3/4" PVDF None Pneumatic-Normally Closed 10-32 UNF Flare 3/4" Flare 3/4" PVDF Nut
PV2208VN2FL08FL08T 1/2" PVDF None Pneumatic-Normally Open 10-32 UNF Flare 1/2" Flare 1/2" PFA Nut
PV2208VN2FL08FL08V 1/2" PVDF None Pneumatic-Normally Open 10-32 UNF Flare 1/2" Flare 1/2" PVDF Nut
PV2208VN2FL12FL12T 3/4" PVDF None Pneumatic-Normally Open 10-32 UNF Flare 3/4" Flare 3/4" PFA Nut
PV2208VN2FL12FL12V 3/4" PVDF None Pneumatic-Normally Open 10-32 UNF Flare 3/4" Flare 3/4" PVDF Nut
PV2204VP1FL04FL04T NA NA None Pneumatic-Normally Closed 1/8-27 NPT Parflare NA Flare 1/4" NA
PV2204VP1FL06FL06T NA NA None Pneumatic-Normally Closed 1/8-27 NPT Parflare NA Flare 1/4" NA
MV2204VT0FL06FL06T 3/8” PVDF None Manual, Multi-turn N/A Flare 3/8" Flare 3/8" PFA Nut
MV2208VT0FL12FL12T 3/4" PVDF None Manual, Multi-turn N/A Flare 3/4"" Flare 3/4"" PFA Nut
PV2208VP1FL08FL08T 1/2" PVDF None Pneumatic, Normally Closed 1/8-27 NPT Flare 1/2"" Flare 1/2"" PFA Nut
PV2208VP1FL12FL12T 3/4" PVDF None Pneumatic-Normally Closed 1/8-27 NPT Flare 3/4"" Flare 3/4"" PFA Nut

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