The Parker 935A and 935T Series Stainless Steel Diaphragm Valve offers excellent leak integrity and gas containment capabilities, making it ideal for use in high-flow UHP applications, including semiconductor fabrication plants. The 935A style body orients the handwheel at angle to accommodate tight spaces without sacrificing access to the handwheel. The 935A and 935T have a position indicator to allow operators to easily determine if the valve is open or closed. A purge port option is offered to simplify drop line purging operations.
Featuring a tied-diaphragm design that provides reliable positive stem retraction, the 935 Series is internally springless and threadless. This reduces surface area and gas entrapment potential that is inherent in bellows valves, allowing for easier purging and minimal particle generation.
The domed diaphragm creates a metal-to-metal seal to the body and allows for maximum stroke while maintaining low stress on the diaphragm weld area.
The valve body is internally electropolished Vericlean™ 316L stainless steel. Vericlean™ is Parker’s proprietary UHP grade stainless steel. Valve seats are available in either PCTFE or Vespel®.
The internal (seat) seal and metal external seal on all 935 Series valves are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.
Markets:
• Fluid & gas handling
• Process control
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial
Features and Benefits:
• Ideal for high-flow, low-pressure applications
• Standard surface finish of 10 micro inch Ra
• Fully functional from vacuum to 300 psig
• Minimal particle generation and gas entrapment
• Metal-to-metal external seal
• Tied diaphragm eliminates springs in wetted area and enhances safety
• Open/Close valve position indicator
• Internal leak rate: ≤4 x 10-9 scc/sec He
• External leak rate: ≤2 x 10-10 scc/sec He
• Valve seats available in either PCTFE (std) or Vespel®
• Two-port, multi-turn handwheel
Applications:
• Corrosive and specialty gases
• Gas distribution systems
• Bulk Specialty Gas Systems (BSGS)
VeriClean™ is a trademark of Parker Hannifin Corporation
Vespel® is a registered trademark of DuPont Performance Elastomers L.L.C.
