UHP Stainless Steel Check Valve – F9 Series | Product Series

Filter by

    No filters selected

Get your Parker account Today!

Create one account to manage everything you do with Parker, from your shopping preferences to your application access.


LOADING IMAGES
UHP Stainless Steel Check Valve – F9 Series

UHP Stainless Steel Check Valve – F9 Series

The F9 Series is a high purity, all welded check valve offering high Cv up to 0.90 in a small footprint to conserve much needed panel space. The F9 is ideally suited for semiconductor fab applications, VMB/VMP, and gas cabinet manufacturers.

Technical Specifications

  • Body Material: VeriClean 316L Stainless Steel
  • Spring Material: Elgiloy, equivalent
  • Seal Material: Fluorocarbon Elastomer (FKM), Perfluoroelastomer (FFKM)
  • Poppet Material: 316L Stainless Steel
  • Seat Material: 316 Stainless Steel
  • Flow Rate: Cv: 0.45 (X 0.89) (1/4" Tube Stub) - 0.90 (X 0.78) (1/4" & 1/2" Face Seal) - 0.90 (X 0.78) (3/8" & 1/2" Tube Stub)
  • Internal Leak Rate: Bubble Tight
  • External Leak Rate: < 1 X 10-9 scc/sec He (Inboard Test Method)
  • Surface Finish: Omit (10 Ra Passivate (std), gold label) - EP (7 Ra Electropolished, blue label)
  • Volume: 0.14 inch3 / 2.29 cm3 (1/4" Face Seal Male)
  • Weight: 0.15 (1/4" Face Seal Male) - 0.07 (1/4" Tube Stub) lb, 2.4 (1/4" Face Seal Male) - 1.2 (1/4" Tube Stub) oz
  • Maximum Inlet Pressure Rating: Fluorocarbon Elastomer, FKM: 3000 | Perfluoroelastomer, FFKM: 1000 psig, 206 barg (Fluorocarbon Elastomer, FKM) - 68 barg (Perfluoroelastomer, FFKM) barg
  • Maximum Back Pressure: 3,000 (Fluorocarbon Elastomer, FKM); 1,000 (Perfluoroelastomer, FFKM) psig, 206 barg (Fluorocarbon Elastomer, FKM) - 68 barg (Perfluoroelastomer, FFKM) barg
  • Cracking Pressure: 0.13 bar, 2 psi
  • Reset Pressure: ≤ 2 psig, ≤ 0.13 barg
  • Maximum Operating Temperature: 66 °C, 150 °F
  • Minimum Operating Temperature: -23 °C, -10 °F
Safety Warning

Full Product Description

Parker Veriflo Division’s F9 Series UHP Check Valve offers improved performance and compatibility featuring a patented asymmetric spring design for a consistently quiet operation and a lower flow restriction compared to competition. The F9’s two seal materials meet all Semi gas compatibility requirements, reducing customer inventories and meeting a wider range of applications. Assembled and packaged in a Class 100 clean room, the F9 is designed for use in ultrahigh purity semiconductor applications.

Markets:
• Semiconductor Fab
• Gas Companies

Features/Benefits:
• Noise Free Operation with the patented asymmetric spring design
• Welded design reduces footprint
• Two seal offerings to meet all SEMI gas compatibility requirements
• Class 100 clean room assembled and packaged
• Electropolished (EP) version for Ultra High Purity applications available
• VeriClean™ 316L Stainless Steel enhances electropolishing and corrosion resistance

Applications:
• Valve Manifold Boxes/Panels
• Gas Cabinets
• Gas Sticks
• Tool Hook-Up

Related Documents

×

687466
938256