The Parker SM955 Series surface mount stainless steel body diaphragm valve offers excellent leak integrity, high cycle life, and low particle generation making it ideal for use in UHP semiconductor applications.

The SM955 Series design has no threads or springs in contact with the process fluid which minimizes particle generation and entrapment for reduced process contamination essential to semiconductor applications. The valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance free service life. The SM955 Series wetted components are fabricated from specialty metals to provide exceptional corrosion resistance and leak integrity. The body is internally electropolished Vericlean™ 316L stainless steel. Vericlean™ is Parker’s proprietary UHP grade stainless steel. The diaphragm is a high strength Cobalt based alloy. The SM955 series also offers seat materials PCTFE, PEEK® and Vespel® to allow the SM955 to be compatible with a wide range of process fluids.  These materials combined with the SM955 Series exacting design features afford the SM955 Series extreme corrosion resistance and maximum cycle life at inlet pressures up to 250 psig.

The SM955 Series air-actuated valves can be configured to provide open-close position indication with either a limit switch or proximity switch. It is also available in multiple body configurations, including the 955Y (Y-valve) and the 955 (face seal and tube stub porting).

The internal (seat) seal and metal external seal on all SM955 Series valves are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Available in standard and high flow C seal and W seal
• 1-1/2 inch surface mount body size
• Flow capacities ranging from .25 Cv (manual standard C seal) to .50 Cv (AOP high flow C seal)
• 5 microinch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and threadless design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 250 psig
• Internal leak rate: ≤ 1 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• 75 psig nominal AOP actuation pressure

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)


VeriClean™ is a trademark of Parker Hannifin Corporation
Vespel® is a registered trademark of DuPont Performance Elastomers L.L.C.
PEEK™ is a trademark of Victrex plc.