Ultra High Purity Gas Regulators

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Ultra High Purity Gas Regulators

Ultra High Purity Gas Regulators

SMSQ2Micro Series pressure regulators are designed for UHP applications requiring precision pressure control in a small envelope. The product’s advanced performance and specifications makes it ideal for use in critical semiconductor tool operations.
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The HF1200W & HFT1200W Series regulator is designed for UHP gas delivery and offers high flow capability with an inlet pressure up to 1,250 psig. The combined high flow and high inlet pressure increases the application range of the regulator.
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Regulator for pressure applications
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The QR4000 & NPR4000 are excellent choices for gas cabinets and bulk gas distribution. Designed for enhanced leak integrity and for applications involving negative delivery pressures.
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The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications
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SQ2Micro regulators are designed for UHP point-of-use applications requiring precision pressure control in a small form factor. The product’s advanced performance and specifications makes it ideal for use in critical semiconductor tool operations.
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The 945 Series Diaphragm Valve provides excellent reliability and leak integrity, making it ideal for use in UHP applications. Available in configurations with flow capacities up to 0.25 Cv and working pressures up to 3,500 psig.
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The Porter Model 415 & 425 Electronic Pressure Regulators combine the proven Porter EPC Electronic Proportional Control Valve with an integrally-mounted pressure sensor and the necessary electronics for self-contained closed-loop pressure control.

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The ABP1 Series is a back pressure regulator designed for use in gas delivery systems to maintain a specified upstream pressure. It is capable of meeting a wide range of back pressure control applications.
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The FR1200 Series Tied-diaphragm Regulator offers high flow and excellent leak integrity at inlet pressures up to 1,700 psig. It has a low spring rate for high sensitivity and is ideal for ultra-high purity bulk and specialty gas delivery systems.
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The ABP3 Series is a high sensitivity back pressure regulator designed for use in gas delivery systems to maintain a specified upstream pressure. It is capable of meeting a wide range of back pressure control applications.
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The IR4000W is a versatile welded stainless steel regulator for both high and low pressure applications, controlling a broad range of corrosive and non-corrosive gases with process proven field reliability.
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The IR6000 Series Regulator provides two stages of pressure reducing regulation for optimum outlet pressure control and is the preferred choice where there is a potential for large inlet pressure changes.
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959W Series Tied-diaphragm Pressure Regulators are designed for high-pressure UHP applications. The series offers excellent reliability and leak integrity, and is ideal for use in gas cabinets, valve manifold boxes, and upstream process lines.
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The BFR5K Series pressure regulator offers high flow in a compact package. Its patented design minimizes outlet pressure fluctuation due to changes in supply pressure, making it ideal for use in UHP bulk gas delivery systems (flows up to 5000 slpm).
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The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications
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735W Series Two-stage Pressure Regulators are designed for high-pressure UHP applications. The series provides excellent reliability and low supply pressure effect -- ensuring stable outlet pressure regardless of inlet pressure fluctuations.
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The 959 regulator is a high pressure, tied diaphragm regulator that is designed to provide shut off of corrosive or hazardous gases if a leak occurs and is capable of controlling a broad range of gases and liquids with process proven field reliability.
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The HF1200 & HFT1200 Series is designed for gas delivery up to 1,250 psi inlet pressure, and has the capability to cover both low and medium pressure applications that demand higher gas flows.
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The AVR4 Series Electrically Heated Pressure Regulator is designed to heat/vaporize process fluid before entering a downstream analyzer system. It is CSA, CE-ATEX certified and features a field-serviceable heat transfer element for minimal downtime.
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The FM80 is a self-contained, pressure-reducing fuel regulation module, designed and qualified as a CNG fuel regulator for up to 3600 psig (250 bar) compressed natural gas (CNG) vehicular fuel systems.
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The SG-1 Series PFA DI Water Spray Gun is designed for use in ultra-high purity semiconductor manufacturing applications. Available with FNPT or Parflare connections, along with optional coiled hoses, with or without recirculation (up to 80 psig).
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The PR-1 Series PTFE Pressure Regulator offers high cycle life and excellent resistance to corrosion. Its non-relieving design requires a 10 psi differential across the valve, thus ensuring stable downstream pressure in aggressive fluid applications.
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The IR4000 is a versatile regulator that works well with both high and low pressure applications. Designed to accept full cylinder pressure, it is capable of controlling a broad range of gases and liquids with process proven field reliability.
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The PR-08 Series PTFE Pressure Regulator is designed for ultra-high purity and aggressive fluid handling systems. Its non-relieving design requires a 5 psi differential across the valve, resulting in better droop characteristics and low hysteresis.
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