Parker Veriflo Division’s QR4000 & NPR4000 Series are non-tied diaphragm, pressure reducing regulators that provide precise control of process gas resulting in a stable flow and pressure supply to downstream systems making it an excellent choice for valve manifold boxes, gas cabinets, and many semiconductor manufacturing applications.
Markets:
• Semiconductor Fab
• Gas Companies
Features/Benefits:
• “VeriClean”, Veriflo’s custom low sulfur high purity 316L Stainless Steel™ enhances electropolishing, welding and corrosion resistance
• Unique compression member loads the seal to the body without requiring a threaded nozzle or additional seals to atmosphere
• Threadless internal nozzle assembly
• Metal-to-metal diaphragm to body seal assures high leak integrity
• Minimal particle generation and entrapment
• Positive upward and downward diaphragm stops
• Standard full internal electropolish
Applications:
• Gas Cabinets
• Valve Manifold Boxes
• Bulk Gas Distribution