The Parker Veriflo division 959W and NPR959W (sub-atmospheric) are the workhorse pressure regulators of ultra-high purity gas distribution systems. The tied-diaphragm design enhances safety by improving shutoff thereby reducing the risk of high-pressure build-up down steam. The seat is further protected from upstream cylinder contamination by an integrated filter screen. The series is suitable for use with both inert and corrosive gases, and features a unique compression member design which eliminates entrapment caused by seat retention threads further improving process cleanliness and purging performance. It is ideal for use in manufacturing operations where cleanliness, reliability, and leak integrity are critical.
The 959W and NPR959W Series wetted components are fabricated from 316L stainless steel to provide excellent corrosion resistance and leak integrity. The body is internally electropolished to further enhance corrosion resistance. A Hastelloy C-22® material trim option is offered for those applications demanding a higher level of corrosion resistance for the critical components (diaphragm, poppet, and compression member). Seats are available in either PCTFE or Vespel®. These materials afford the regulators excellent corrosion resistance and maximum cycle life at inlet pressures up to 3,500 psig.
Both the internal (seat) seal and metal external seal on the regulators are inboard Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.
For non-UHP applications, refer to the standard 959 and NPR959 Series Pressure Regulators.
Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial
Features and Benefits:
• Unique compression member loads seal to body without requiring a threaded nozzle
• High cycle life
• Metal-to-metal diaphragm-to-body seal ensures high leak integrity
• Internal leak rate: <2 x 10-9 scc/sec He
• External leak rate: <2 x 10-10 scc/sec He
• Inlet pressures up to 3,500 psig
• Outlet pressures from -25 in-Hg to 100 psig (NPR959W for sub-atmospheric pressure control)
• Cv options 0.04 (std) or 0.20
• 15 – 20 Ra (std) or 10 Ra electropolish surface finish
Applications:
• Corrosive and specialty gases
• Tool hook-ups
• Gas cabinets
• Valve manifold boxes (VMB)
• Upstream process lines
Vespel® is a registered trademark of DuPont Performance Elastomers L.L.C.
Hastelloy C-22® is a registered trademark of Haynes International, Inc.
