UHP Single Stage Pressure Reducing Regulator - FR1000 Series | Product Series

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Presión de salida

Material del cuerpo

Coeficiente del caudal (CV)

Número de puertos

Conexión del puerto

Tipo de conexión del puerto

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UHP Single Stage Pressure Reducing Regulator - FR1000 Series UHP Single Stage Pressure Reducing Regulator - FR1000 Series

UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

Especificaciones técnicas

  • Coeficiente del caudal: 0.09, 0.15 Cv
  • Rango de presión de entrada máxima: 3500 psig
  • Rango de presión de salida: 1-30 psig, 2-60 psig, 2-100 psig, 5-150 psig, 1-10 psig
  • Material del asiento: PCTFE
  • Número de puertos: 2
  • Tipo de puerto: 1/4" Face Seal, 3/8" Face Seal
  • Conexión del puerto: Male, Male, Female, Female
  • Material del cuerpo: 316L Stainless Steel, 316L Stainless Steel Double Melt
  • Opciones: na, Hastelloy Trim (Poppet)
  • Tasa de fuga interna: 4 x 10 -8 scc/sec He
  • Temperatura de funcionamiento: -40°F to 150°F (-40°C to 66°C)
  • Materiales del diafragma: Hastelloy C-22®
  • Material del resorte: 316L Stainless Steel
  • Material del filtro: Hastelloy C-22®
  • Acabado superficial: 10 Ra microinch (.25 micrometer), 25 Ra (Optional)
  • Volumen: 0.49 cm3
Safety Warning

Descripción completa del producto

Veriflo Division’s FR1000 Series are non-tied diaphragm, pressure reducing regulators that offer low to intermediate flow capability with an inlet pressure up to 3500 psig. The FR1000 provides precise control of process gas resulting in a stable flow and pressure supply to downstream systems making it an excellent choice for valve manifold boxes, gas cabinets, and many semiconductor manufacturing applications.
The standard Hastelloy C-22® diaphragm and integrated filtration promote long life performance while the metal-to-metal diaphragm seal assures high leak integrity.
The FR1000 offers the same quality, reliability, and performance levels expected of Parker products, at a highly competitive price point. The new line complements our current, premium QR4000 Series regulators, and in combination, will serve a wide range of applications in semiconductor fabrication.

Markets:
• Semiconductor Manufacturing
• Gas Companies
• Analytical Laboratory
• Industrial
• Pharmaceutical
• BioPharm

Features/Benefits:
• Metal-to-Metal Diaphragm Seal assures high leak integrity
• Manufactured for ultra high purity gas delivery applications
• 10 μ inch Ra Surface Finish
• Passivated & Electropolished
• Integrated Filtration
• Hastelloy® diaphragm standard
• Flow capacity: 0.09 & 0.15 Cv

Applications:
• Tool Hook-Up
• Valve Manifold Boxes
• Process Gas Cabinets
• “Point of Use” pressure regulation

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