The TS Series is a fluoropolymer thermocouple sensor assembly designed for point-of-use temperature monitoring in fluid handling systems, including those used in ultra-high purity (UHP) semiconductor manufacturing applications. The wetted components of the assembly are made from high-purity PFA and PTFE, which afford it high cycle life, exceptional corrosion resistance, and compatibility with a wide range of aggressive process media.
The assembly comes equipped with a 10 mil PFA-coated thermocouple; however, it can be fitted with any 1/8 inch size probe to meet the unique requirements of customers’ systems. The probe is inserted through a special assembly, which locates it directly into the flow stream. The design of the assembly has minimal dead space and entrapment areas, making it ideal for ultra-high purity tool fab applications, where cleanliness is critical.
The TS Series thermocouple assembly is available in an angled or straight thru pattern design. Port sizes range from 1/4 inch to 1 inch and can be fitted with Parbond, Parflare or Redi-flare connections. The connections reduce assembly and installation time, while ensuring a leak-tight seal for performance in clean-area operations.
Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial
Features/Benefits:
• Ideally suited for point-of-use ultra-high purity fluid handling systems
• PFA/PTFE wetted components offer exceptional corrosion resistance
• One piece drop in assembly
• Custom molded fitting for 1/8 inch thermocouple sensors and leak free connection
• Minimal dead space and entrapment areas for performance in clean-area applications
Applications:
• Corrosive and specialty chemicals, acids, bases, and slurries
• Semiconductor tool hook-ups
• Wet benches
• Fluid handling systems
