UHP PFA Tube Fittings (sizes up to 1 inch) – Parflare Series
UHP Fluoropolymer ultra clean valves are made from PFA and PTFE for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries.
These new, ultra clean, fluoropolymer, manual and pneumatic valves offer increased flow and provide better seat sealing for enhanced, leak-free performance for greater safety. They are designed to deliver the highest flow in the smallest package available. Computational fluid dynamics software was utilized to maximize the flow through these valves. These ultra clean valves are for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries. Other demanding markets can use these valves for their cleanliness and ability to carry highly corrosive chemicals.
Markets:
• Semiconductor processing
• Chemical Processing
• Analytical Equipment
• Laboratory
Features/Benefits:
• High cycle life in acids and slurry
• Compact footprint with a true lock-out, tag-out design (LOTO)
• Dual point seal provides double the sealing power (patent pending)
• Smooth bore and fully swept path, minimizes particle entrapment areas and prevents stagnation
• 100% leak tested
• Meets SEMI-F57-0301 Standards
Key Applications:
• Chemical Mechanical Polishing (CMP) Slurries
• Ultra high purity processes
• Clear chemistries for semiconductor processes
• Blender systems
• Cleaning systems
Parker Hannifin Corporation
Veriflo Division
250 Canal Boulevard
Richmond, CA 94804 USA
Teléfono
+1 (510) 235-9590
Fax
+1 (510) 232-7396
Cree una cuenta para gestionar todo lo que haga con Parker, desde sus preferencias de compra hasta su acceso a la aplicación.