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Ultra-High Purity (UHP) High-pressure Diaphragm Valve Manifold – 945Y Series

Where to Buy

The 945Y Series combines two valves into a single body simplifying the integration of a purge line into a gas system. Ideal for (ultra-high purity) semiconductor applications needing flow capacities up to 0.25 Cv and operating pressures up to 3500 psig.

Full Product Description

The 945Y Series Diaphragm Valve combines two valves into a single compact body, thus simplifying the integration of a purge system into a gas manifold and improving the effectiveness of the purge process. The series offers excellent leak integrity, high cycle life, and low particle generation from vacuum to 3,500 psig -- making it ideal for use in high-pressure UHP semiconductor applications, including gas cabinets, valve manifold boxes (VMBs), and upstream process lines.
The 945Y Series valve is available with a variety of manual operators and air operated (AOP) actuators. It is internally springless and thread less, which minimizes particle generation and entrapment, resulting in extreme cleanliness and reduced process contamination. The valve also features a unique compression member that loads the seal uniformly without the need for threaded components or crimping operations
The 945Y Series’ unique design controls seat and diaphragm stresses to provide a reliable and maintenance-free service life. Wetted components are fabricated from Veriflo’s proprietary VeriClean™ 316L internally electropolished stainless steel. Seat materials are available in PCTFE, PEEK® and Vespel®, which allow the valve to accommodate a wide range of hazardous and inert process fluids. The diaphragm of the valve is made from a high-strength cobalt-based alloy. These materials, combined with the 945Y Series exacting design features, afford it exceptional corrosion resistance, reliability, and cleanliness at extremely high inlet pressures.
The 945Y Series is offered in several flow path configurations to accommodate upstream, downstream, and common path purging applications. Internal dead leg volumes are minimized to improve purging effectiveness. Air-operated valves can be configured to provide open-close position indication with a limit switch.
All 945Y valves are fabricated in a Class 100 cleanroom. The internal (seats) seals and metal external seals are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.
Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

Features/Benefits:
• Y-valve configuration allows for a mix of operator combinations and reduces space requirements
• 10 micro inch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and thread less design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 3,500
• Internal leak rate: ≤ 1 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• 75 psig nominal AOP actuation pressure
• Cv 0.25 (HP, NC, NO, I), Cv 0.18 (M), Cv 0.17 purge valve

Vespel – TM DuPont Performance Elastomers L.L.C.
VeriClean – TM Parker Hannifin Corporation, Veriflo Division
PEEK − TM Victrex plc.

Related Documents

Literature and Reference Materials
Veriflo CAD File Locator Guide
Veriflo Product Selection & Operation Safety Guide
Diaphragm Valve 945Y Series

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Products	Body Style	Actuation Type	Connection 1 Type	Connection 2 Type	Connection 3 Type	Body Style	Actuation Type	Connection 1 Type	Connection 2 Type	Connection 3 Type
945Y1NC/NCFSFFFA	Down Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y1NC/NCFSFFMA	Down Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y1NC/NCFSFMFA	Down Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y1NC/NCFSFMMA	Down Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y1NC/NCFSMFFA	Down Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y1NC/NCFSMFMA	Down Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y1NC/NCFSMMFA	Down Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y1NC/NCFSMMMA	Down Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y1NC/NOFSFFFA	Down Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y1NC/NOFSFFMA	Down Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y1NC/NOFSFMFA	Down Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y1NC/NOFSFMMA	Down Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y1NC/NOFSMFFA	Down Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y1NC/NOFSMFMA	Down Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y1NC/NOFSMMFA	Down Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y1NC/NOFSMMMA	Down Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y1NO/NCFSFFFA	Down Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y1NO/NCFSFFMA	Down Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y1NO/NCFSFMFA	Down Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y1NO/NCFSFMMA	Down Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y1NO/NCFSMFFA	Down Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y1NO/NCFSMFMA	Down Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y1NO/NCFSMMFA	Down Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y1NO/NCFSMMMA	Down Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y1NO/NOFSFFFA	Down Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y1NO/NOFSFFMA	Down Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y1NO/NOFSFMFA	Down Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y1NO/NOFSFMMA	Down Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y1NO/NOFSMFFA	Down Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y1NO/NOFSMFMA	Down Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y1NO/NOFSMMFA	Down Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y1NO/NOFSMMMA	Down Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Down Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y2NC/NCFSFMFA	Up Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y2NC/NCFSFMMA	Up Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y2NC/NCFSMFFA	Up Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y2NC/NCFSMFMA	Up Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y2NC/NCFSMMFA	Up Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y2NC/NCFSMMMA	Up Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y2NC/NOFSFMFA	Up Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y2NC/NOFSMFMA	Up Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y2NC/NOFSMMFA	Up Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y2NC/NOFSMMMA	Up Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y2NO/NCFSFFFA	Up Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y2NO/NCFSFFMA	Up Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y2NO/NCFSFMFA	Up Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y2NO/NCFSFMMA	Up Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y2NO/NCFSMFMA	Up Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y2NO/NCFSMMFA	Up Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y2NO/NCFSMMMA	Up Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y2NO/NOFSFFFA	Up Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y2NO/NOFSFFMA	Up Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y2NO/NOFSFMFA	Up Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y2NO/NOFSFMMA	Up Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y2NO/NOFSMFFA	Up Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y2NO/NOFSMFMA	Up Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y2NO/NOFSMMFA	Up Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Female __5
945Y2NO/NOFSMMMA	Up Stream Purge	V1: Normally Open, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y2NC/NCFSFFFB	Up Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4” Face Seal Female	1/4” Face Seal Female	1/4” Face Seal Female	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4” Face Seal Female __3	4__1/4” Face Seal Female __4	5__1/4” Face Seal Female __5
945Y2NC/NCFSFFFA	Up Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y2NC/NCFSFFMA	Up Stream Purge	V1: Normally Closed, V2: Normally Closed	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Closed __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y2NC/NOFSFFFA	Up Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y2NC/NOFSFFMA	Up Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Female	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Male __5
945Y2NO/NCFSMFFA	Up Stream Purge	V1: Normally Open, V2: Normally Closed	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Open, V2: Normally Closed __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5
945Y2NC/NOFSFMMA	Up Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Female	1/4" Face Seal, Male	1/4" Face Seal, Male	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Female __3	4__1/4 Face Seal, Male __4	5__1/4 Face Seal, Male __5
945Y2NC/NOFSMFFA	Up Stream Purge	V1: Normally Closed, V2: Normally Open	1/4" Face Seal, Male	1/4" Face Seal, Female	1/4" Face Seal, Female	1__Up Stream Purge __1	2__V1: Normally Closed, V2: Normally Open __2	3__1/4 Face Seal, Male __3	4__1/4 Face Seal, Female __4	5__1/4 Face Seal, Female __5

Ultra-High Purity (UHP) High-pressure Diaphragm Valve Manifold – 945Y Series | Product Series

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Ultra-High Purity (UHP) High-pressure Diaphragm Valve Manifold – 945Y Series

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