UHP PTFE Air-operated Slurry Valve (up to 1 inch) – PV-20 Series | Product Series

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UHP PTFE Air-operated Slurry Valve (up to 1 inch) – PV-20 Series

UHP PTFE Air-operated Slurry Valve (up to 1 inch) – PV-20 Series

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The PV-20 Series PTFE Slurry Valve offers exceptional sealing of aggressive chemicals and abrasive slurry media. The valve minimizes particle generation and is designed for use in semiconductor manufacturing and clean-area applications.

Technical Specifications

  • Wetted Material: PTFE, Modified PTFE
  • Non-Wetted Material: PVDF, Viton, PTFE Coated SS Spring
  • Pressure Rating: 27" HG vacuum (913 mbar) - 80 psig (5.5 bar) (1/4" Orifice) 27" HG vacuum (913 nbar) - 100 psig (7 bar) (1/2" Orifice) (1" Orifice)
  • Actuation Pressure: 60 psig (4.1 bar) - 80 psig (5.5 bar)
  • Maximum Ambient Temperature: 66 °C, 150 °F
  • Minimum Ambient Temperature: -17 °C, 0 °F
  • Maximum Fluid Temperature: 130 °C, 266 °F
  • Minimum Fluid Temperature: -17 °C, 0 °F
  • Port 2 Size: 1/4 (Parflare), 3/8 (Parflare), 1/2 (Parflare), 3/4 (Parflare), 1 (Parflare), 1-1/4 (Parflare) inch
  • Flow Rate: Cv: 0.20, 0.76, 2.4, 3.9, 6.4, 10.9, 13.5
  • Flow Coefficient: Kv: 2.8 to 192.9 L/min
Safety Warning

Full Product Description

The PV-20 Series is a PTFE fluoropolymer air-operated diaphragm valve used for flow control of abrasive slurry media and aggressive fluids in semiconductor and clean-area applications. The valve’s flow path design produces minimal pressure drop, which allows for lower pressure requirements upstream and improved fluid flow dynamics. It is available in 2-way and 3-way configurations, along with three orifice sizes (1/4 inch, 1/2 inch, and 1 inch). Port sizes range from 1/4 to 1-1/4 inches, and can be supplied with Parflare, Pargrip or Nippon Pillar S300 end connections.

The body of the PV-20 Series slurry valve is made from virgin 100% ultra-high purity PTFE for superior chemical resistance. This, coupled with a one-piece modified PTFE diaphragm, affords the valve with excellent flexibility and maximum cycle at pressures up to 100 psig. The valve itself is also highly compact, which enables operators to conserve critical cleanroom and sub-fab space.

The angled and rounded flow path of the PV-20 Series, plus an open and swept bowl shape around its diaphragm, minimizes turbulence and eliminates sharp angles that can cause fluid shear. This reduces particle entrapment and provides increased protection against corrosion.

Overall, the valve’s design makes it particularly suitable for handling abrasive and corrosive slurry fluids, such as such those found in the CMP (chemical-mechanical planarization or chemical-mechanical polishing) processes employed in semiconductor fabrication. The PV-20 Series is also suitable for a wide range of other clean-area processing and analytical applications, such as controlling the flow of acids, chemicals and DI water.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Exceptional resistance to corrosion
• Evenly distributed seat sealing forces minimizes diaphragm and valve seat strain while stabilizing valve back pressure capability
• Maximized diaphragm thickness minimizes potential for permeation while maximizing cycle life
• Self-draining design aids reliability when used with aggressive fluids in an open-loop system
• Compliant with the SEMI-F57-0301 standard for polymer components
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)
• Fully functional from vacuum to 100 psig

Applications:
• Semiconductor Tools
• Tool Hook-ups
• Slurry and Aggressive Chemical Distribution Systems
• DI Water

Related Documents

Literature and Reference Materials
Veriflo Product Selection & Operation Safety Guide
Partek PFA/PTFE Valves--Catalog 4182/USA
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Products Port Connection 1 (inch) Body Size (inch) Nut Material Actuation
PV-20-04-1604 1/4" Parflare 1/4" PVDF Normally Closed
PV-20-04-1606 3/8" Parflare 1/4" PVDF Normally Closed
PV-20-04-2604 1/4" Parflare 1/4" PVDF Normally Open
PV-20-04-2606 3/8" Parflare 1/4" PVDF Normally Open
PV-20-08-1608-R-T 1/2" Parflare 1/2" PFA Normally Closed
PV-20-08-1612-R 3/4" Parflare 1/2" PVDF Normally Closed
PV-20-08-1612-R-T 3/4" Parflare 1/2" PFA Normally Closed
PV-20-08-2608-R-T 1/2" Parflare 1/2" PFA Normally Open
PV-20-08-2612-R 3/4" Parflare 1/2" PVDF Normally Open
PV-20-08-2612-R-T 3/4" Parflare 1/2" PFA Normally Open
PV-20-16-1612 3/4" Parflare 1" PVDF Normally Closed
PV-20-16-1612-T 3/4" Parflare 1" PFA Normally Closed
PV-20-16-1616 1" Parflare 1" PVDF Normally Closed
PV-20-16-1616-T 1" Parflare 1" PFA Normally Closed
PV-20-16-1620 1-1/4" Parflare 1" PVDF Normally Closed
PV-20-16-1620-T 1-1/4" Parflare 1" PFA Normally Closed
PV-20-16-2612 3/4" Parflare 1" PVDF Normally Open
PV-20-16-2616 1" Parflare 1" PVDF Normally Open
PV-20-16-2616-T 1" Parflare 1" PFA Normally Open
PV-20-16-2620 1-1/4" Parflare 1" PVDF Normally Open
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