UHP Metal Face Seal Fittings | Product Series

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UHP Metal Face Seal Fittings

UHP Metal Face Seal Fittings

Parker 316L Stainless Steel Metal Gasket Face Seal Fittings are made for use in ultra high purity semiconductor applications. When assembled, the toroid face forms a leak-tight metal-to-metal connection in vacuum or positive pressure conditions.

Technical Specifications

  • Fitting Type: Face Seal
  • Configuration: Female Gland, Male Gland, Female Gland Hi-Flo, Male Weld Gland, Socket Weld, Reducing Socket Weld, Short Socket Weld, Tube Adapter Gland, Female Nut, Male Nut, Male Nut Hi-Flo, Short Male Nut, Female Cap, Female Cap Lanyard, Male Plug, Male Plug Lanyard
  • Connection Size: 1/4, 1/4 x 3/8, 1/2, 1/2 x 1/4, 3/4, 1, 1/4 x 1/8, 1/2 x 3/8 inch
  • Materials of Construction: Stainless Steel 316L, Double Melt Stainless Steel 316L, Stainless Steel 316
  • Options: na, Electropolish
  • Tube Length: 25, 75, na, 38 inch
  • Overall Length: 0.54 to 1.31 inch
Safety Warning

Full Product Description

Parker Veriflo’s SEMI F20 material grade UHP Metal Face Seal Fittings, Glands, Caps & Nuts provide cost effective solutions and guarantee Parker’s quality, reliability and performance.
Parker Metal Face Seal Fittings are designed for critical applications where ultrahigh purity conditions are required. The mating gasket and toroid design provide a high integrity metal-to-metal seal for reliable service from vacuum to positive pressure. Standard finish metal face seal fittings have an internal surface roughness average of 10 ?in. (0.25?m) Ra. PE finished fittings have an internal surface roughness average of 5 ?in. (0.13?m) Ra and UHP wetted surface condition.
Parker uses a Patented TorqTiteâ„¢ gasket that initially contacts on the inner taper, radially forcing out any entrapped contaminants, and a smooth transition into the Internal Diameter minimizes entrapment areas.
The UHP Metal Face Seal Fittings line allows Parker to compete in fab applications at a competitive price point and complements Parker’s current VacuSeal and Mini buttweld lines whose robust design works best for critical applications at the semiconductor tool.

Markets:
• Semiconductor Fabrication

Features/Benefits:
• Compact Design allows for system miniaturization and close coupled spacing
• Material traceability via permanently marked heat codes on each wetted component
• Permanent product designation identifies manufacturer, material and internal finish when applicable
• Enhanced female nut silver plating promotes consistent easy assembly
• Controlled wetted surfaces meet stringent ultra high purity system requirements by preventing outgassing and inhibiting corrosion
• Patented Torqtite™ gasket promotes sealing of damaged toroids and virtually eliminates assembly loosening due to vibration or thermo-cycling

Applications:
• Tool Hook-Up
• Valve Manifold Boxes
• Gas Cabinets

Related Documents

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Products Configuration Connection Size (inch) Body Material Options Tube Length (inch) Overall Length (inch)
SSS-4FG-25 Female Gland 1/4" Stainless Steel 316L na 25 na
SSS-4FG-75 Female Gland 1/4" Stainless Steel 316L na 75 na
SSS-4MG-25 Male Gland 1/4" Stainless Steel 316L na 25 na
SSS-46HFG-1.19 Female Gland Hi-Flo 1/4" x 3/8" Stainless Steel 316L na na 1.19
SSS-4MW Male Weld Gland 1/4" Stainless Steel 316L na na na
SSS-46HFG-.60 Female Gland Hi-Flo 1/4" x 3/8" Stainless Steel 316L na na 0.6
SSS-4MG-75 Male Gland 1/4" Stainless Steel 316L na 75 na
SSS-8MW Male Weld Gland 1/2" Stainless Steel 316L na na na
SSS-8MG-75 Male Gland 1/2" Stainless Steel 316L na 75 na
SSS-8FG-75 Female Gland 1/2" Stainless Steel 316L na 75 na
SSS-84MW Male Weld Gland 1/2" x 1/4" Stainless Steel 316L na na na
SSS-4MG-38 Male Gland 1/4" Stainless Steel 316L na 38 na
SSS-84MG-75 Male Gland 1/2" x 1/4" Stainless Steel 316L na 75 na
SSS-12MW Male Weld Gland 3/4" Stainless Steel 316L na na na
SSS-12MG-75 Male Gland 3/4" Stainless Steel 316L na 75 na
SSS-12SW Socket Weld 3/4" Stainless Steel 316L na na na
SSS-16MG-75 Male Gland 1" Stainless Steel 316L na 75 na
SSS-16MW Male Weld Gland 1" Stainless Steel 316L na na na
SSS-16SW Socket Weld 1" Stainless Steel 316L na na na
SSS-42RSW Reducing Socket Weld 1/4" x 1/8" Stainless Steel 316L na na na
SSS-46HFG-1.31 Female Gland Hi-Flo 1/4" x 3/8" Stainless Steel 316L na na 1.31
SSS-4FG-38 Female Gland 1/4" Stainless Steel 316L na 38 na
SSS-4SSW-.50 Short Socket Weld 1/4" Stainless Steel 316L na na 0.5
SSS-4SSW-.75 Short Socket Weld 1/4" Stainless Steel 316L na na 0.75
SSS-4SW Socket Weld 1/4" Stainless Steel 316L na na na
SSS-4TAG Tube Adapter Gland 1/4" Stainless Steel 316L na na na
SSS-84FG-75 Female Gland 1/2" x 1/4" Stainless Steel 316L na 75 na
SSS-84RSW Reducing Socket Weld 1/2" x 1/4" Stainless Steel 316L na na na
SSS-86FG-25 Female Gland 1/2" x 3/8" Stainless Steel 316L na 25 na
SSS-86FG-75 Female Gland 1/2" x 3/8" Stainless Steel 316L na 75 na
SSS-86MG-25 Male Gland 1/2" x 3/8" Stainless Steel 316L na 25 na
SSS-86MG-38 Male Gland 1/2" x 3/8" Stainless Steel 316L na 38 na
SSS-86MG-75 Male Gland 1/2" x 3/8" Stainless Steel 316L na 75 na
SSS-86MW Male Weld Gland 1/2" x 3/8" Stainless Steel 316L na na na
SSS-86SW Socket Weld 1/2" x 3/8" Stainless Steel 316L na na na
SSS-86TAG Tube Adapter Gland 1/2" x 3/8" Stainless Steel 316L na na na
SSS-8FG-25 Female Gland 1/2" Stainless Steel 316L na 25 na
SSS-8FG-38 Female Gland 1/2" Stainless Steel 316L na 38 na
SSS-8MG-38 Male Gland 1/2" Stainless Steel 316L na 38 na
SSS-8SW Socket Weld 1/2" Stainless Steel 316L na na na
SSS-8TAG Tube Adapter Gland 1/2" Stainless Steel 316L na na na
SSS-4FG-25-PE Female Gland 1/4" Stainless Steel 316L Electropolish 25 na
SSS-4FG-75-PE Female Gland 1/4" Stainless Steel 316L Electropolish 75 na
SSS-4MG-25-PE Male Gland 1/4" Stainless Steel 316L Electropolish 25 na
SSS-46HFG-.60-PE Female Gland Hi-Flo 1/4" x 3/8" Stainless Steel 316L Electropolish na 0.6
SSS-4MG-75-PE Male Gland 1/4" Stainless Steel 316L Electropolish 75 na
SSS-8MG-75-PE Male Gland 1/2" Stainless Steel 316L Electropolish 75 na
SSS-8FG-75-PE Female Gland 1/2" Stainless Steel 316L Electropolish 75 na
SSS-4MG-38-PE Male Gland 1/4" Stainless Steel 316L Electropolish 38 na
SSS-84MG-75-PE Male Gland 1/2" x 1/4" Stainless Steel 316L Electropolish 75 na
SSS-12MG-75-PE Male Gland 3/4" Stainless Steel 316L Electropolish 75 na
SSS-12MW-PE Male Weld Gland 3/4" Stainless Steel 316L Electropolish na na
SSS-12SW-PE Socket Weld 3/4" Stainless Steel 316L Electropolish na na
SSS-16MG-75-PE Male Gland 1" Stainless Steel 316L Electropolish 75 na
SSS-16MW-PE Male Weld Gland 1" Stainless Steel 316L Electropolish na na
SSS-16SW-PE Socket Weld 1" Stainless Steel 316L Electropolish na na
SSS-42RSW-PE Reducing Socket Weld 1/4" x 1/8" Stainless Steel 316L Electropolish na na
SSS-46HFG-1.19-PE Female Gland Hi-Flo 1/4" x 3/8" Stainless Steel 316L Electropolish na 1.19
SSS-46HFG-1.31-PE Female Gland Hi-Flo 1/4" x 3/8" Stainless Steel 316L Electropolish na 1.31
SSS-4FG-38-PE Female Gland 1/4" Stainless Steel 316L Electropolish 38 na
SSS-4MW-PE Male Weld Gland 1/4" Stainless Steel 316L Electropolish na na
SSS-4SSW-.50-PE Short Socket Weld 1/4" Stainless Steel 316L Electropolish na 0.5
SSS-4SSW-.75-PE Short Socket Weld 1/4" Stainless Steel 316L Electropolish na 0.75
SSS-4SW-PE Socket Weld 1/4" Stainless Steel 316L Electropolish na na
SSS-4TAG-PE Tube Adapter Gland 1/4" Stainless Steel 316L Electropolish na na
SSS-84FG-75-PE Female Gland 1/2" x 1/4" Stainless Steel 316L Electropolish 75 na
SSS-84MW-PE Male Weld Gland 1/2" x 1/4" Stainless Steel 316L Electropolish na na
SSS-84RSW-PE Reducing Socket Weld 1/2" x 1/4" Stainless Steel 316L Electropolish na na
SSS-86FG-25-PE Female Gland 1/2" x 3/8" Stainless Steel 316L Electropolish 25 na
SSS-86FG-75-PE Female Gland 1/2" x 3/8" Stainless Steel 316L Electropolish 75 na
SSS-86MG-25-PE Male Gland 1/2" x 3/8" Stainless Steel 316L Electropolish 25 na
SSS-86MG-38-PE Male Gland 1/2" x 3/8" Stainless Steel 316L Electropolish 38 na
SSS-86MG-75-PE Male Gland 1/2" x 3/8" Stainless Steel 316L Electropolish 75 na
SSS-86MW-PE Male Weld Gland 1/2" x 3/8" Stainless Steel 316L Electropolish na na
SSS-86SW-PE Socket Weld 1/2" x 3/8" Stainless Steel 316L Electropolish na na
SSS-86TAG-PE Tube Adapter Gland 1/2" x 3/8" Stainless Steel 316L Electropolish na na
SSS-8FG-25-PE Female Gland 1/2" Stainless Steel 316L Electropolish 25 na
SSS-8FG-38-PE Female Gland 1/2" Stainless Steel 316L Electropolish 38 na
SSS-8MG-38-PE Male Gland 1/2" Stainless Steel 316L Electropolish 38 na
SSS-8MW-PE Male Weld Gland 1/2" Stainless Steel 316L Electropolish na na
SSS-8SW-PE Socket Weld 1/2" Stainless Steel 316L Electropolish na na
SSS-8TAG-PE Tube Adapter Gland 1/2" Stainless Steel 316L Electropolish na na
SSD-4FG-75-PE Female Gland 1/4" Double Melt Stainless Steel 316L Electropolish 75 na
SSD-46HFG-1.31-PE Female Gland Hi-Flo 1/4" x 3/8" Double Melt Stainless Steel 316L Electropolish na 1.31
SSD-4FG-25-PE Female Gland 1/4" Double Melt Stainless Steel 316L Electropolish 25 na
SSD-4MG-25-PE Male Gland 1/4" Double Melt Stainless Steel 316L Electropolish 25 na
SSD-46HFG-1.19-PE Female Gland Hi-Flo 1/4" x 3/8" Double Melt Stainless Steel 316L Electropolish na 1.19
SSD-4MG-75-PE Male Gland 1/4" Double Melt Stainless Steel 316L Electropolish 75 na
SSD-46HFG-.60-PE Female Gland Hi-Flo 1/4" x 3/8" Double Melt Stainless Steel 316L Electropolish na 0.6
SSD-8MG-75-PE Male Gland 1/2" Double Melt Stainless Steel 316L Electropolish 75 na
SSD-4MG-38-PE Male Gland 1/4" Double Melt Stainless Steel 316L Electropolish 38 na
SSD-8FG-75-PE Female Gland 1/2" Double Melt Stainless Steel 316L Electropolish 75 na
SSD-84MG-75-PE Male Gland 1/2" x 1/4" Double Melt Stainless Steel 316L Electropolish 75 na
SSD-86FG-25-PE Female Gland 1/2" x 3/8" Double Melt Stainless Steel 316L Electropolish 25 na
SSD-16MG-75-PE Male Gland 1" Double Melt Stainless Steel 316L Electropolish 75 na
SSD-4FG-38-PE Female Gland 1/4" Double Melt Stainless Steel 316L Electropolish 38 na
SSD-84FG-75-PE Female Gland 1/2" x 1/4" Double Melt Stainless Steel 316L Electropolish 75 na
SSD-86FG-75-PE Female Gland 1/2" x 3/8" Double Melt Stainless Steel 316L Electropolish 75 na
SSD-86MG-25-PE Male Gland 1/2" x 3/8" Double Melt Stainless Steel 316L Electropolish 25 na
SSD-86MG-38-PE Male Gland 1/2" x 3/8" Double Melt Stainless Steel 316L Electropolish 38 na
SSD-86MG-75-PE Male Gland 1/2" x 3/8" Double Melt Stainless Steel 316L Electropolish 75 na
SSD-8FG-25-PE Female Gland 1/2" Double Melt Stainless Steel 316L Electropolish 25 na
SSD-8FG-38-PE Female Gland 1/2" Double Melt Stainless Steel 316L Electropolish 38 na
SSD-8MG-38-PE Male Gland 1/2" Double Melt Stainless Steel 316L Electropolish 38 na
SSD-12MG-75-PE Male Gland 3/4" Double Melt Stainless Steel 316L Electropolish 75 na
SS-12FN Female Nut 3/4" Stainless Steel 316 na na na
SS-16FN Female Nut 1" Stainless Steel 316 na na na
SS-4FN Female Nut 1/4" Stainless Steel 316 na na na
SS-8FN Female Nut 1/2" Stainless Steel 316 na na na
SS-12MN Male Nut 3/4" Stainless Steel 316 na na na
SS-16MN Male Nut 1" Stainless Steel 316 na na na
SS-4MN Male Nut 1/4" Stainless Steel 316 na na na
SS-8MN Male Nut 1/2" Stainless Steel 316 na na na
SS-4HFN Female Gland Hi-Flo 1/4" Stainless Steel 316 na na na
SS-4HMN Male Nut Hi-Flo 1/4" Stainless Steel 316 na na na
SS-4SMN-.54 Short Male Nut 1/4" Stainless Steel 316 na na 0.54
SS-12FCP Female Cap 3/4" Stainless Steel 316L na na na
SS-16FCP Female Cap 1" Stainless Steel 316L na na na
SS-4FCP Female Cap 1/4" Stainless Steel 316L na na na
SS-8FCP Female Cap 1/2" Stainless Steel 316L na na na
SS-4FCPL Female Cap Lanyard 1/4" Stainless Steel 316L na na na
SS-8FCPL Female Cap Lanyard 1/2" Stainless Steel 316L na na na
SS-12MPG Male Plug 3/4" Stainless Steel 316L na na na
SS-16MPG Male Plug 1" Stainless Steel 316L na na na
SS-4MPG Male Plug 1/4" Stainless Steel 316L na na na
SS-8MPG Male Plug 1/2" Stainless Steel 316L na na na
SS-4MPGL Male Plug Lanyard 1/4" Stainless Steel 316L na na na
SS-8MPGL Male Plug Lanyard 1/2" Stainless Steel 316L na na na
SS-12FCP-PE Female Cap 3/4" Stainless Steel 316L Electropolish na na
SS-16FCP-PE Female Cap 1" Stainless Steel 316L Electropolish na na
SS-4FCP-PE Female Cap 1/4" Stainless Steel 316L Electropolish na na
SS-8FCP-PE Female Cap 1/2" Stainless Steel 316L Electropolish na na
SS-4FCPL-PE Female Cap Lanyard 1/4" Stainless Steel 316L Electropolish na na
SS-8FCPL-PE Female Cap Lanyard 1/2" Stainless Steel 316L Electropolish na na
SS-12MPG-PE Male Plug 3/4" Stainless Steel 316L Electropolish na na
SS-16MPG-PE Male Plug 1" Stainless Steel 316L Electropolish na na
SS-4MPG-PE Male Plug 1/4" Stainless Steel 316L Electropolish na na
SS-8MPG-PE Male Plug 1/2" Stainless Steel 316L Electropolish na na
SS-4MPGL-PE Male Plug Lanyard 1/4" Stainless Steel 316L Electropolish na na
SS-8MPGL-PE Male Plug Lanyard 1/2" Stainless Steel 316L Electropolish na na

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