Series II Standard Mass Flow Controller

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Our Series II mass flow controllers & meters offer outstanding value in a wide range of applications. Exceptional accuracy for flow ranges from 0.014 sccm to 1,670 slpm, all with optional multi-gas and multi-range capability for maximum flexibility.

Technical Specifications

Flow Rate: Up to 1670 L/min
Pressure Control Range: 928 PSIA - 1450 PSIA
Connection Type: Compression, Face Seal Male, None, Other
Connection Size: 1/8"-1/2" | 6 mm - 20 mm
Communication Interface: Analog or digital: RS-232, DeviceNet, Profibus-DP, Modbus-RTU
Valve Type: Normally Open, Normally Closed
Seal Material: EPDM, Kalrez, Viton (Standard)
Body Material: 316L Stainless Steel
Flow Rate Accuracy: Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)
Turndown Ratio: 1 : 50 (in digital mode up to 1 : 187.5)
Repeatability: < 0.2% reading
Settling Time: Standard: 2 - 4 seconds
Control Stability: < ±0.1% Full Scale (typical for 1 l/min N2)
Maximum Operating Temperature: 70 °C
Minimum Operating Temperature: -10 °C
Temperature Coefficient: Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °C
Pressure Coefficient: 0.1 ATM typical N2; 0.01% / ATM typical H2 ATM
Leak Rate: Tested < 2 x 10-9 mbar l/s He L/sec
Attitude Sensitivity: Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2
Warm-Up Time: 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale
Wetted Material: 316L Stainless Steel
Surface Finish: 0.8 µm typical
Connection Material: 316L Stainless Steel
Specifications Met: IP40
Power Supply Voltage: +15 - 24 Vdc
Power Consumption: Max. 320 mA; Add 50 mA Profibus, if applicable
Electrical Connection: 9-PIN D-Connector

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Full Product Description

Parker's highly precise mass flow controllers provide you the diagnostic stability and repeatability you need for low flow gas applications. Controlling thermal mass flow rates from 0.6 l/m to 1,670 l/m with high precision and <0.2% repeatability. Rated for 8 separate gas types which are customer field adjustable. Our thermal mass flow controller is available in both digital and analog styles, fully compatible with RS232 and digital protocols such as Profibus. If you're not sure what gas you're going to use or your process changes, our MFC allows you to migrate to a new gas within your flow range without purchasing a new mass flow controller.

Markets:
• Laboratory and Process Instrumentation
• Pharma/Bio-Pharma Equipment
• Air Quality Monitoring System
• Furnace and Coatings

Features/Benefits:
• Fast, Repeatable and Reliable Performance
• Premium Accuracy with Proven Thermal Mass Flow Sensor and Laminar Flow Element
• Easy to integrate into your new or existing systems
• Asset calibration management software included
• Cleaned for analytical use
• Fails shut with Normally Closed Valve for safe operation
• CE, REACH and RoHS II

Applications:
• Gas Control for Laboratory and Process Equipment
• Burner Ratio Control for Ceramics and Metals
• Process and Environmental Analyzers
• Emissions Monitors and Calibrators

Series II Standard Mass Flow Controller | Product Series

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Series II Standard Mass Flow Controller

Technical Specifications

Full Product Description

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