Parker’s patented Evolve™ sealing technology equips users with unparalleled plasma resistance and phenomenal seal cleanliness for static and quasi-dynamic sealing applications in place of standard o-rings.
Using an engineered PTFE shield as a plasma barrier, the composite PTFE-FFKM vacuum seal delivers breakthrough performance within semiconductor fabrication equipment by extending seal uptime 2X-10X with dramatic reduction in leakage and seal contamination due to plasma attack. This represents a significant advancement over traditional o-ring sealing solutions. Unlike conventional seals, the Evolve seal is engineered to prevent unexpected tool downtime caused by seal failure, enabling fabs to strategically schedule preventive maintenance based on mechanical wear rather than unpredictable seal deterioration.
Beyond its superior material properties, the Evolve seal is designed with the user in mind. It features integrated ribs or nubs to facilitate easier, straightforward installation into existing seal groove designs such as dovetail, half-dovetail, and rectangular grooves. Additionally, it can be engineered for customized groove configurations per customer requirements, for any number of typical static and quasi-static applications including:
•Chamber lid seals
•Exhaust valves
•ISO valve seal
•Wafer pedestal seal
•Slit valve door seal
•Viewport seal
•Gas inlet/outlet seals
•Gas ring and gas nozzle seals
•Window seals
•Fitting seals
•Center rings
•Quartz chamber seals
•Plenum seals
•KF centering ring
Contact our application engineering experts to discuss how Evolve sealing technology can improve operational efficiencies.
