UHP Single Stage Pressure Reducing Regulator - FR1000 Series | Product Series

Filter by

    No filters selected

Outlet Pressure

Body Material

Flow Coefficient (Cv)

Number of Ports

Port Connection

Port Connection Type

Get your Parker account Today!

Create one account to manage everything you do with Parker, from your shopping preferences to your application access.


LOADING IMAGES
UHP Single Stage Pressure Reducing Regulator - FR1000 Series UHP Single Stage Pressure Reducing Regulator - FR1000 Series

UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

Technical Specifications

  • Flow Coefficient: 0.09, 0.15 Cv
  • Maximum Inlet Pressure Rating: 3500 psig
  • Outlet Pressure Rating: 1-30 psig, 2-60 psig, 2-100 psig, 5-150 psig, 1-10 psig
  • Seat Material: PCTFE
  • Number of Ports: 2
  • Port Type: 1/4" Face Seal, 3/8" Face Seal
  • Port Connection: Male, Male, Female, Female
  • Body Material: 316L Stainless Steel, 316L Stainless Steel Double Melt
  • Options: na, Hastelloy Trim (Poppet)
  • Internal Leak Rate: 4 x 10 -8 scc/sec He
  • Operating Temperature: -40°F to 150°F (-40°C to 66°C)
  • Diaphragm Material: Hastelloy C-22®
  • Poppet Material: 316L Stainless Steel
  • Filter Material: Hastelloy C-22®
  • Surface Finish: 10 Ra microinch (.25 micrometer), 25 Ra (Optional)
  • Volume: 0.49 cm3
Safety Warning

Full Product Description

Veriflo Division’s FR1000 Series are non-tied diaphragm, pressure reducing regulators that offer low to intermediate flow capability with an inlet pressure up to 3500 psig. The FR1000 provides precise control of process gas resulting in a stable flow and pressure supply to downstream systems making it an excellent choice for valve manifold boxes, gas cabinets, and many semiconductor manufacturing applications.
The standard Hastelloy C-22® diaphragm and integrated filtration promote long life performance while the metal-to-metal diaphragm seal assures high leak integrity.
The FR1000 offers the same quality, reliability, and performance levels expected of Parker products, at a highly competitive price point. The new line complements our current, premium QR4000 Series regulators, and in combination, will serve a wide range of applications in semiconductor fabrication.

Markets:
• Semiconductor Manufacturing
• Gas Companies
• Analytical Laboratory
• Industrial
• Pharmaceutical
• BioPharm

Features/Benefits:
• Metal-to-Metal Diaphragm Seal assures high leak integrity
• Manufactured for ultra high purity gas delivery applications
• 10 μ inch Ra Surface Finish
• Passivated & Electropolished
• Integrated Filtration
• Hastelloy® diaphragm standard
• Flow capacity: 0.09 & 0.15 Cv

Applications:
• Tool Hook-Up
• Valve Manifold Boxes
• Process Gas Cabinets
• “Point of Use” pressure regulation

Related Documents

×
Products Outlet Pressure Body Material Flow Coefficient (Cv) Number of Ports Port Connection Port Connection Type
FR1003S9K2PFSMM 1-30 psig 316L Stainless Steel 0.09 2 Male, Male 1/4" Face Seal
FR1006S9K2PFSMM 2-60 psig 316L Stainless Steel 0.09 2 Male, Male 1/4" Face Seal
FR1010S9K2PFSMM 2-100 psig 316L Stainless Steel 0.09 2 Male, Male 1/4" Face Seal
FR1015S9K2PFSMM 5-150 psig 316L Stainless Steel 0.09 2 Male, Male 1/4" Face Seal
FR1003S9K2PFSFF 1-30 psig 316L Stainless Steel 0.09 2 Female, Female 1/4" Face Seal
FR1006S9K2PFSFF 2-60 psig 316L Stainless Steel 0.09 2 Female, Female 1/4" Face Seal
FR1010S9K2PFSFF 2-100 psig 316L Stainless Steel 0.09 2 Female, Female 1/4" Face Seal
FR1015S9K2PFSFF 5-150 psig 316L Stainless Steel 0.09 2 Female, Female 1/4" Face Seal
FR1003S9K2PFS6MM 1-30 psig 316L Stainless Steel 0.09 2 Male, Male 3/8" Face Seal
FR1006S9K2PFS6MM 2-60 psig 316L Stainless Steel 0.09 2 Male, Male 3/8" Face Seal
FR1010S9K2PFS6MM 2-100 psig 316L Stainless Steel 0.09 2 Male, Male 3/8" Face Seal
FR1015S9K2PFS6MM 5-150 psig 316L Stainless Steel 0.09 2 Male, Male 3/8" Face Seal
FR1001D15V2PFS6MMTH 1-10 psig 316L Stainless Steel Double Melt 0.15 2 Male, Male 3/8" Face Seal
FR1003D15V2PFS6MMTH 1-30 psig 316L Stainless Steel Double Melt 0.15 2 Male, Male 3/8" Face Seal
FR1006D15V2PFS6MMTH 2-60 psig 316L Stainless Steel Double Melt 0.15 2 Male, Male 3/8" Face Seal
FR1010D15V2PFS6MMTH 2-100 psig 316L Stainless Steel Double Melt 0.15 2 Male, Male 3/8" Face Seal
FR1015D15V2PFS6MMTH 5-150 psig 316L Stainless Steel Double Melt 0.15 2 Male, Male 3/8" Face Seal
FR1003S9K2PFS6FF 1-30 psig 316L Stainless Steel 0.09 2 Female, Female 3/8" Face Seal
FR1006S9K2PFS6FF 2-60 psig 316L Stainless Steel 0.09 2 Female, Female 3/8" Face Seal
FR1010S9K2PFS6FF 2-100 psig 316L Stainless Steel 0.09 2 Female, Female 3/8" Face Seal
FR1015S9K2PFS6FF 5-150 psig 316L Stainless Steel 0.09 2 Female, Female 3/8" Face Seal
FR1001S9K2PFSFF 1-10 psig 316L Stainless Steel 0.09 2 Female, Female 1/4" Face Seal
FR1001S9K2PFSMM 1-10 psig 316L Stainless Steel 0.09 2 Male, Male 1/4" Face Seal
FR1001S9K2PFS6FF 1-10 psig 316L Stainless Steel 0.09 2 Female, Female 3/8" Face Seal
FR1001S9K2PFS6MM 1-10 psig 316L Stainless Steel 0.09 2 Male, Male 3/8" Face Seal
FR1003S15K2PFSFF 1-30 psig 316L Stainless Steel 0.15 2 Female, Female 1/4" Face Seal
FR1015S15K2PFSFF 5-150 psig 316L Stainless Steel 0.15 2 Female, Female 1/4" Face Seal
FR1006S15K2PFSFF 2-60 psig 316L Stainless Steel 0.15 2 Female, Female 1/4" Face Seal
FR1010S15K2PFSFF 2-100 psig 316L Stainless Steel 0.15 2 Female, Female 1/4" Face Seal
FR1001S15K2PFSFF 1-10 psig 316L Stainless Steel 0.15 2 Female, Female 1/4" Face Seal
FR1003S15K2PFSMM 1-30 psig 316L Stainless Steel 0.15 2 Male, Male 1/4" Face Seal
FR1015S15K2PFSMM 5-150 psig 316L Stainless Steel 0.15 2 Male, Male 1/4" Face Seal
FR1006S15K2PFSMM 2-60 psig 316L Stainless Steel 0.15 2 Male, Male 1/4" Face Seal
FR1010S15K2PFSMM 2-100 psig 316L Stainless Steel 0.15 2 Male, Male 1/4" Face Seal
FR1001S15K2PFSMM 1-10 psig 316L Stainless Steel 0.15 2 Male, Male 1/4" Face Seal
FR1003S15K2PFS6FF 1-30 psig 316L Stainless Steel 0.15 2 Female, Female 3/8" Face Seal
FR1015S15K2PFS6FF 5-150 psig 316L Stainless Steel 0.15 2 Female, Female 3/8" Face Seal
FR1006S15K2PFS6FF 2-60 psig 316L Stainless Steel 0.15 2 Female, Female 3/8" Face Seal
FR1010S15K2PFS6FF 2-100 psig 316L Stainless Steel 0.15 2 Female, Female 3/8" Face Seal
FR1001S15K2PFS6FF 1-10 psig 316L Stainless Steel 0.15 2 Female, Female 3/8" Face Seal
FR1003S15K2PFS6MM 1-30 psig 316L Stainless Steel 0.15 2 Male, Male 3/8" Face Seal
FR1015S15K2PFS6MM 5-150 psig 316L Stainless Steel 0.15 2 Male, Male 3/8" Face Seal
FR1006S15K2PFS6MM 2-60 psig 316L Stainless Steel 0.15 2 Male, Male 3/8" Face Seal
FR1010S15K2PFS6MM 2-100 psig 316L Stainless Steel 0.15 2 Male, Male 3/8" Face Seal
FR1001S15K2PFS6MM 1-10 psig 316L Stainless Steel 0.15 2 Male, Male 3/8" Face Seal
FR1001D9V2PFSFFTH 1-10 psig 316L Stainless Steel Double Melt 0.09 2 Female, Female 1/4" Face Seal
FR1003D9V2PFSFFTH 1-30 psig 316L Stainless Steel Double Melt 0.09 2 Female, Female 1/4" Face Seal
FR1006D9V2PFSFFTH 2-60 psig 316L Stainless Steel Double Melt 0.09 2 Female, Female 1/4" Face Seal
FR1010D9V2PFSFFTH 2-100 psig 316L Stainless Steel Double Melt 0.09 2 Female, Female 1/4" Face Seal
FR1015D9V2PFSFFTH 5-150 psig 316L Stainless Steel Double Melt 0.09 2 Female, Female 1/4" Face Seal
FR1001D9V2PFSMMTH 1-10 psig 316L Stainless Steel Double Melt 0.09 2 Male, Male 1/4" Face Seal
FR1003D9V2PFSMMTH 1-30 psig 316L Stainless Steel Double Melt 0.09 2 Male, Male 1/4" Face Seal
FR1006D9V2PFSMMTH 2-60 psig 316L Stainless Steel Double Melt 0.09 2 Male, Male 1/4" Face Seal
FR1010D9V2PFSMMTH 2-100 psig 316L Stainless Steel Double Melt 0.09 2 Male, Male 1/4" Face Seal
FR1015D9V2PFSMMTH 5-150 psig 316L Stainless Steel Double Melt 0.09 2 Male, Male 1/4" Face Seal
FR1001D9V2PFS6FFTH 1-10 psig 316L Stainless Steel Double Melt 0.09 2 Female, Female 3/8" Face Seal
FR1003D9V2PFS6FFTH 1-30 psig 316L Stainless Steel Double Melt 0.09 2 Female, Female 3/8" Face Seal
FR1006D9V2PFS6FFTH 2-60 psig 316L Stainless Steel Double Melt 0.09 2 Female, Female 3/8" Face Seal
FR1010D9V2PFS6FFTH 2-100 psig 316L Stainless Steel Double Melt 0.09 2 Female, Female 3/8" Face Seal
FR1015D9V2PFS6FFTH 5-150 psig 316L Stainless Steel Double Melt 0.09 2 Female, Female 3/8" Face Seal
FR1001D9V2PFS6MMTH 1-10 psig 316L Stainless Steel Double Melt 0.09 2 Male, Male 3/8" Face Seal
FR1003D9V2PFS6MMTH 1-30 psig 316L Stainless Steel Double Melt 0.09 2 Male, Male 3/8" Face Seal
FR1006D9V2PFS6MMTH 2-60 psig 316L Stainless Steel Double Melt 0.09 2 Male, Male 3/8" Face Seal
FR1010D9V2PFS6MMTH 2-100 psig 316L Stainless Steel Double Melt 0.09 2 Male, Male 3/8" Face Seal
FR1015D9V2PFS6MMTH 5-150 psig 316L Stainless Steel Double Melt 0.09 2 Male, Male 3/8" Face Seal
FR1001D15V2PFSFFTH 1-10 psig 316L Stainless Steel Double Melt 0.15 2 Female, Female 1/4" Face Seal
FR1003D15V2PFSFFTH 1-30 psig 316L Stainless Steel Double Melt 0.15 2 Female, Female 1/4" Face Seal
FR1006D15V2PFSFFTH 2-60 psig 316L Stainless Steel Double Melt 0.15 2 Female, Female 1/4" Face Seal
FR1010D15V2PFSFFTH 2-100 psig 316L Stainless Steel Double Melt 0.15 2 Female, Female 1/4" Face Seal
FR1015D15V2PFSFFTH 5-150 psig 316L Stainless Steel Double Melt 0.15 2 Female, Female 1/4" Face Seal
FR1001D15V2PFSMMTH 1-10 psig 316L Stainless Steel Double Melt 0.15 2 Male, Male 1/4" Face Seal
FR1003D15V2PFSMMTH 1-30 psig 316L Stainless Steel Double Melt 0.15 2 Male, Male 1/4" Face Seal
FR1006D15V2PFSMMTH 2-60 psig 316L Stainless Steel Double Melt 0.15 2 Male, Male 1/4" Face Seal
FR1010D15V2PFSMMTH 2-100 psig 316L Stainless Steel Double Melt 0.15 2 Male, Male 1/4" Face Seal
FR1015D15V2PFSMMTH 5-150 psig 316L Stainless Steel Double Melt 0.15 2 Male, Male 1/4" Face Seal
FR1001D15V2PFS6FFTH 1-10 psig 316L Stainless Steel Double Melt 0.15 2 Female, Female 3/8" Face Seal
FR1003D15V2PFS6FFTH 1-30 psig 316L Stainless Steel Double Melt 0.15 2 Female, Female 3/8" Face Seal
FR1006D15V2PFS6FFTH 2-60 psig 316L Stainless Steel Double Melt 0.15 2 Female, Female 3/8" Face Seal
FR1010D15V2PFS6FFTH 2-100 psig 316L Stainless Steel Double Melt 0.15 2 Female, Female 3/8" Face Seal
FR1015D15V2PFS6FFTH 5-150 psig 316L Stainless Steel Double Melt 0.15 2 Female, Female 3/8" Face Seal
FRN1001S15K2P4 1-10 psig 316L Stainless Steel 0.15 2 1/4" NPT Female 1/4" NPT Female
FRN1003S15K4PXX4 1-30 psig 316L Stainless Steel 0.15 4 1/4" NPT Female 1/4" NPT Female
FRN1010S15K3PX4 2-100 psig 316L Stainless Steel 0.15 3 1/4" NPT Female 1/4" NPT Female
FRN1010S15K4PXX4 2-100 psig 316L Stainless Steel 0.15 4 1/4" NPT Female 1/4" NPT Female
FRN1010S9K3PX4 2-100 psig 316L Stainless Steel 0.09 3 1/4" NPT Female 1/4" NPT Female
FRN1010S9K4PXX4 2-100 psig 316L Stainless Steel 0.09 4 1/4" NPT Female 1/4" NPT Female
FRN1015S15K2P4 5-150 psig 316L Stainless Steel 0.15 2 1/4" NPT Female 1/4" NPT Female
FRN1015S15K2P4T 5-150 psig 316L Stainless Steel 0.15 2 1/4" A-LOK 1/4" A-LOK
FRN1015S15K2P6T 5-150 psig 316L Stainless Steel 0.15 2 3/8" A-LOK 3/8" A-LOK
FRN1015S15K3PVY4T 5-150 psig 316L Stainless Steel 0.15 3 1/4" A-LOK 1/4" A-LOK
FRN1015S15K3PVY6T 5-150 psig 316L Stainless Steel 0.15 3 3/8" A-LOK 3/8" A-LOK
FRN1015S15K3PX4 5-150 psig 316L Stainless Steel 0.15 3 1/4" NPT Female 1/4" NPT Female
FRN1015S15K4P4 5-150 psig 316L Stainless Steel 0.15 4 1/4" NPT Female 1/4" NPT Female
FRN1015S15K4PBVY4 5-150 psig 316L Stainless Steel 0.15 4 1/4" NPT Female 1/4" NPT Female
FRN1015S15K4PXX4 5-150 psig 316L Stainless Steel 0.15 4 1/4" NPT Female 1/4" NPT Female
FRN1015S9K4P4 5-150 psig 316L Stainless Steel 0.15 4 1/4" NPT Female 1/4" NPT Female
FRN1020S15K3PX4 5-200 psig 316L Stainless Steel 0.15 3 1/4" NPT Female 1/4" NPT Female
FRN1020S15K4PXX4 5-200 psig 316L Stainless Steel 0.15 4 1/4" NPT Female 1/4" NPT Female
FRN1030S15K3PX4 5-300 psig 316L Stainless Steel 0.15 3 1/4" NPT Female 1/4" NPT Female
FRN1030S15K4PXX4 5-300 psig 316L Stainless Steel 0.15 4 1/4" NPT Female 1/4" NPT Female

687466
938256