Ultra-High Purity (UHP) High-Pressure Diaphragm Valve – 945 Series
The 970 series diaphragm valve offers high flow, .70 Cv, in a compact package, which makes it suitable for use in situations where workable space is limited, such as gas boxes, gas cabinets, and valve manifold boxes (VMBs). It can be manually, or air operated with a maximum operating pressure of 250 and 150 psig respectively.
All 970 Series valves are cleaned to exacting semiconductor industry requirements and assembled in class 100 cleanroom environments. Prior to shipping, all valve seals (seat, and diaphragm) are 100% Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.
Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)
• 5 micro inch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and thread less design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 250 psig
• Internal leak rate: ≤ 1 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• Flow Capacity: .7
Vespel – TM DuPont Performance Elastomers L.L.C.
PEEK – TM Victrex plc.