UHP Metal Gasket Face Seal Fitting (sizes up to 1 inch) – VacuSeal™
Parker Veriflo’s line of SEMI F20 material grade UHP weld fittings provide cost effective solutions and guarantee Parker’s quality, reliability and performance.
Parker Weld fittings are designed for applications where ultra high purity applications are required and provide compact designs for use with orbital weld equipment. Standard finish weld fittings have an internal surface roughness average of 10 µin. (0.25µm) Ra while PE finished fittings have an internal surface roughness average of 5 µin. (0.13µm) Ra.
The UHP Weld Fittings line allows Parker to compete in fab applications at a competitive price point and complements Parker’s current VacuSeal and Mini buttweld lines, whose robust design works best for critical applications at the semiconductor tool.
Market:
• Semiconductor Fabrication
Features/Benefits:
• Compact Design allows for system miniaturization and close coupled spacing
• Material traceability via permanently marked heat codes on each wetted component
• Permanent product designation identifies manufacturer, material and internal finish when applicable
• Sharp and square tube ends improves alignment and weld repeatability
• Smooth, radiused junctions promote better flow transition, reduces turbulent flow, and reduces possible entrapment sites
• Controlled wetted surfaces meet stringent ultra high purity system requirements by preventing outgassing and inhibiting corrosion
Applications:
• Tool Hook-Up
• Valve Manifold Boxes
• Gas Cabinets
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Parker Hannifin Corporation
Veriflo Division
250 Canal Boulevard
Richmond, CA 94804 USA
Teléfono
+1 (510) 235-9590
Fax
+1 (510) 232-7396
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