UHP High-Flow Bulk Facility Valve (up to 375 psig) – 700 Series | Product Series

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UHP High-Flow Bulk Facility Valve (up to 375 psig) – 700 Series

UHP High-Flow Bulk Facility Valve (up to 375 psig) – 700 Series

The 700 Series High-Flow Bulk Facility Valve is intended for use in ultra-high purity gas distribution systems. It features a unique lightweight design that reduces installation costs and can accommodate connection sizes up to 6-inches.

Especificaciones técnicas

  • Material del cuerpo: 316L Stainless Steel
  • Material del tubo: 316L Stainless Steel
  • Material del retentor del asiento: 316 Stainless Steel (0706)
    316L Stainless Steel (0708, 0712, 0716, 0724)
  • Material del adaptador del fuelle: 316L Stainless Steel
  • Material del fuelle: 316L Stainless Steel (0706)
    Inconel 625 (0708, 0712, 0716, 0724)
  • Material del asiento: PCTFE
  • Material de la junta del sombrerete: Nickel
  • Material del mango: Aluminum
  • Material del vástago: 316L, 17-4 Stainless Steel
  • Material del controlador del vástago: Bronze
  • Material de la guía: Brass
  • Material del sombrerete: Aluminum
  • Acabado superficial: 10 micro inch Ra
  • Peso: 3.2 (Min), 40.4 (Max) lb
  • Presión de prueba: 375 psig (25.86 barg) (0706)
    562.5 psig (38.78 barg) (0708, 0712, 0716, 0724)
  • Presión de rotura: 750 psig (51.71 barg) (0706)
    1,125 psig (77.57 barg) (0708, 0712, 0716, 0724)
  • Caudal: Cv: 19 (Min) to 294 (Max)
  • Tasa de fuga interna: 1 x 10-10 scc/sec He (Rated)
    1 x 10-9 scc/sec He (Std Production)
  • Tasa de fuga externa: 1 x 10-10 scc/sec He
  • Presión de trabajo máxima: 250 psig (0706)
    375 psig (0708, 0712, 0716, 0724) psig, 17.24 barg (0706)
    25.86 barg (0708, 0712, 0716, 0724) barg
  • Presión de accionamiento: 100 psig (6.9 barg, nominal)
  • Tamaño de la conexión de entrada de aire: 1/8 - 27 NPT
  • Temperatura máxima de funcionamiento: 140 °F, 60 °C
  • Temperatura mínima de funcionamiento: -40 °F, -40 °C
Safety Warning

Descripción completa del producto

The Parker 700 Series Bulk Facility Valve (with high flow bellows) offers superior performance and reliability in ultra-high purity (UHP) gas distribution and bulk delivery systems.

The 700 Series unique low-weight design reduces installation costs compared to valves of similar size and flow capacities on the market. It exhibits excellent leak integrity and gas containment capabilities, making it ideal for use in applications where process cleanliness is critical, including microelectronic manufacturing operations.

The 700 Series Bulk Facility Valve provides a number of advantages over traditional ball valve designs, including minimal particle generation and lower internal and external leak rates. This reduces process gas contamination, which is essential to wafer/semiconductor production.  

Valve materials of construction increase durability and resistance to process gas corrosion. Bodies are constructed from electropolished 316L Stainless Steel. Valve sizes 1.5-inch and larger utilize an Inconel 625 bellows, which provides superior strength and corrosion resistance, affording the 700 Series with maximum cycle life at operating pressures up to 375 psig.
  
700 Series Valves are built in a Class 100 cleanroom. 100% of the valves are inboard and across-seat Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
• Semiconductor Fab
• Gas Companies

Features/Benefits:
• Lightweight design reduces installation costs
• Sizes up to 6-inches available
• Maximum operating pressure 375 psig (250 psig 1-inch size)
• Internal leak rate: 1 x 10-10 scc/sec He (rated)
• External leak rate: 1 x 10-10 scc/sec He
• Available in manual and air actuated (AOP) configurations
• Air actuated options available in 1-inch, 1.5-inch, and 2-inch sizes
• Inlet and outlet purge ports

Applications:
• Gas Cabinets

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