Parker solutions are engineered to provide extended life which means equipment can run longer before requiring maintenance to replace failing seals. With decades of material
expertise working with high performance thermoplastics and engineered fluoropolymers, including PEEK. PTFE, and filled PTFE compounds, we  know what it takes to engineer optimal solutions to meet the specific requirements for semiconductor customers.  

Our FlexiSeal"' profiles, Series FIN-H and FEN-H, provide reliable flange and gap sealing between chamber and atmospheric pressures in deposition and etch operations. Manufactured from high performance PTFE materials with attributes including outstanding chemical compatibility, thermal stability and extremely low friction, our FlexiSeal profiles are engineered to provide long service life in extreme environments.

Product Profiles:
Series FIN-H and FEN-H face seals (sometimes called flange seals) for internal or external pressure in static or intermittent dynamic applications provide reliable flange and gap sealing between chamber and atmospheric pressures in deposition and etch operations.

Profile Features:
• High purity virgin or filled PTFE materials depending on application requirements
• High unit contact load for increased sealing ability
• Ultra broad chemical compatibility to media and gases
• Low leachable materials with minimal outgassing
• Wide temperature range (-450F to +600F)
• Low friction
• Long life PTFE sealing materials resistant to degradation, heat aging and physical property alteration during temperature cycling

Jacket design:  
Rounded lip shape contacts the mating surface in much the same way as an O-ring.  The helical spring, along with the round, beaded style contact points deliver high unit load for increased sealing ability.

Spring design:
H Series, helical spring.  The helical spring design is intended for static or intermittent dynamic applications due to the high unit load.  The H series spring produces evenly distributed load across each individual band, with very small gaps between the coils.  The tight spacing provides near continuous load, reducing potential leak paths.  This, combined with the high unit load, makes the H series well-suited or vacuum applications or when pressure is too low to energize the seal.  

Materials:
Jacket:  Virgin and filled PTFE compounds
Spring:  Corrosion resistant helical wound springs are available in metal alloys, including Stainless Steel, Elgiloy; PEEK


Applications:
FIN-H Series:  For internal static and intermittently dynamic flange and gap sealing between chamber and atmospheric pressures
FEN-H Series:  For external static and intermittently dynamic flange and gap sealing between chamber and atmospheric pressures