Ultra-High Purity (UHP) High-pressure Diaphragm Valve Manifold – 945Y Series | Product Series

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Ultra-High Purity (UHP) High-pressure Diaphragm Valve Manifold – 945Y Series

Ultra-High Purity (UHP) High-pressure Diaphragm Valve Manifold – 945Y Series

Puntos de venta

The 945Y Series combines two valves into a single body simplifying the integration of a purge line into a gas system. Ideal for (ultra-high purity) semiconductor applications needing flow capacities up to 0.25 Cv and operating pressures up to 3500 psig.

Descripción completa del producto

The 945Y Series Diaphragm Valve combines two valves into a single compact body, thus simplifying the integration of a purge system into a gas manifold and improving the effectiveness of the purge process. The series offers excellent leak integrity, high cycle life, and low particle generation from vacuum to 3,500 psig -- making it ideal for use in high-pressure UHP semiconductor applications, including gas cabinets, valve manifold boxes (VMBs), and upstream process lines.
The 945Y Series valve is available with a variety of manual operators and air operated (AOP) actuators. It is internally springless and thread less, which minimizes particle generation and entrapment, resulting in extreme cleanliness and reduced process contamination. The valve also features a unique compression member that loads the seal uniformly without the need for threaded components or crimping operations
The 945Y Series’ unique design controls seat and diaphragm stresses to provide a reliable and maintenance-free service life. Wetted components are fabricated from Veriflo’s proprietary VeriClean™ 316L internally electropolished stainless steel. Seat materials are available in PCTFE, PEEK® and Vespel®, which allow the valve to accommodate a wide range of hazardous and inert process fluids. The diaphragm of the valve is made from a high-strength cobalt-based alloy. These materials, combined with the 945Y Series exacting design features, afford it exceptional corrosion resistance, reliability, and cleanliness at extremely high inlet pressures.
The 945Y Series is offered in several flow path configurations to accommodate upstream, downstream, and common path purging applications. Internal dead leg volumes are minimized to improve purging effectiveness. Air-operated valves can be configured to provide open-close position indication with a limit switch.
All 945Y valves are fabricated in a Class 100 cleanroom. The internal (seats) seals and metal external seals are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.
Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

Features/Benefits:
• Y-valve configuration allows for a mix of operator combinations and reduces space requirements
• 10 micro inch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and thread less design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 3,500
• Internal leak rate: ≤ 1 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• 75 psig nominal AOP actuation pressure
• Cv 0.25 (HP, NC, NO, I), Cv 0.18 (M), Cv 0.17 purge valve

Vespel – TM DuPont Performance Elastomers L.L.C.
VeriClean – TM Parker Hannifin Corporation, Veriflo Division
PEEK − TM Victrex plc.

Documentos relacionados

Literature and Reference Materials
Veriflo CAD File Locator Guide
Veriflo Product Selection & Operation Safety Guide
Diaphragm Valve 945Y Series
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Productos Estilo del cuerpo Tipo de accionamiento Tipo de conexión 1 Tipo de conexión 2 Tipo de conexión 3
945Y2NC/NCFSFFFA Up Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y2NC/NCFSFFMA Up Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y2NC/NOFSFFFA Up Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y2NC/NOFSFFMA Up Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y2NO/NCFSMFFA Up Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y2NC/NOFSFMMA Up Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y2NC/NOFSMFFA Up Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y1NC/NCFSFFFA Down Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y1NC/NCFSFFMA Down Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y1NC/NCFSFMFA Down Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y1NC/NCFSFMMA Down Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y1NC/NCFSMFFA Down Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y1NC/NCFSMFMA Down Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y1NC/NCFSMMFA Down Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y1NC/NCFSMMMA Down Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y1NC/NOFSFFFA Down Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y1NC/NOFSFFMA Down Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y1NC/NOFSFMFA Down Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y1NC/NOFSFMMA Down Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y1NC/NOFSMFFA Down Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y1NC/NOFSMFMA Down Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y1NC/NOFSMMFA Down Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y1NC/NOFSMMMA Down Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y1NO/NCFSFFFA Down Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y1NO/NCFSFFMA Down Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y1NO/NCFSFMFA Down Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y1NO/NCFSFMMA Down Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y1NO/NCFSMFFA Down Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y1NO/NCFSMFMA Down Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y1NO/NCFSMMFA Down Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y1NO/NCFSMMMA Down Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y1NO/NOFSFFFA Down Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y1NO/NOFSFFMA Down Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y1NO/NOFSFMFA Down Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y1NO/NOFSFMMA Down Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y1NO/NOFSMFFA Down Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y1NO/NOFSMFMA Down Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y1NO/NOFSMMFA Down Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y1NO/NOFSMMMA Down Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y2NC/NCFSFMFA Up Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y2NC/NCFSFMMA Up Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y2NC/NCFSMFFA Up Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y2NC/NCFSMFMA Up Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y2NC/NCFSMMFA Up Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y2NC/NCFSMMMA Up Stream Purge V1: Normally Closed, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y2NC/NOFSFMFA Up Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y2NC/NOFSMFMA Up Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y2NC/NOFSMMFA Up Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y2NC/NOFSMMMA Up Stream Purge V1: Normally Closed, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y2NO/NCFSFFFA Up Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y2NO/NCFSFFMA Up Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y2NO/NCFSFMFA Up Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y2NO/NCFSFMMA Up Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y2NO/NCFSMFMA Up Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y2NO/NCFSMMFA Up Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y2NO/NCFSMMMA Up Stream Purge V1: Normally Open, V2: Normally Closed 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y2NO/NOFSFFFA Up Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y2NO/NOFSFFMA Up Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y2NO/NOFSFMFA Up Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y2NO/NOFSFMMA Up Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Female 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y2NO/NOFSMFFA Up Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Female
945Y2NO/NOFSMFMA Up Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Female 1/4" Face Seal, Male
945Y2NO/NOFSMMFA Up Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Female
945Y2NO/NOFSMMMA Up Stream Purge V1: Normally Open, V2: Normally Open 1/4" Face Seal, Male 1/4" Face Seal, Male 1/4" Face Seal, Male
945Y2NC/NCFSFFFB Up Stream Purge V1: Normally Closed, V2: Normally Closed 1/4” Face Seal Female 1/4” Face Seal Female 1/4” Face Seal Female
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