The MV-20 Series is a PTFE fluoropolymer manual diaphragm valve used for flow control of abrasive slurry media and aggressive fluids in semiconductor and clean-area applications. The valve’s flow path design produces minimal pressure drop, which allows for lower pressure requirements upstream and improved fluid flow dynamics. It is available in 2-way and 3-way configurations, along with three orifice sizes (1/4 inch, 1/2 inch, and 1 inch). Port sizes range from 1/4 to 1-1/4 inches, and can be supplied with Parflare, Pargrip or Nippon Pillar S300 end connections.
The body of the MV-20 Series slurry valve is made from virgin 100% ultra-high purity PTFE for superior chemical resistance. This, coupled with a one-piece modified PTFE diaphragm, affords the valve with excellent flexibility and maximum cycle at pressures up to 100 psig. The valve itself is also highly compact, which enables operators to conserve critical cleanroom and sub-fab space.
The angled and rounded flow path of the MV-20 Series, plus an open and swept bowl shape around its diaphragm, minimizes turbulence and eliminates sharp angles that can cause fluid shear. This reduces particle entrapment and provides increased protection against corrosion.
Overall, the valve’s design makes it particularly suitable for handling abrasive and corrosive slurry fluids, such as such those found in the CMP (chemical-mechanical planarization or chemical-mechanical polishing) processes employed in semiconductor fabrication. The MV-20 Series is also suitable for a wide range of other clean-area processing and analytical applications, such as controlling the flow of acids, chemicals, and DI water.
The internal (seat) seal of the MV-20 Series is Helium leak tested to ensure performance and reliability in clean-area applications, where high leak integrity and minimal particle generation are of the utmost importance.
For an air-operated version of the MV-20 Series slurry valve, refer to the PV-20 Series.
Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial
Features/Benefits:
• Exceptional resistance to corrosion
• Evenly distributed seat sealing forces minimizes diaphragm and valve seat strain while stabilizing valve back pressure capability
• Maximized diaphragm thickness minimizes potential for permeation while maximizing cycle life.
• Self-draining design aids reliability when used with aggressive fluids in an open-loop system
• Compliant with the SEMI-F57-0301 standard for polymer components
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)
• Fully functional from vacuum to 100 psig
Applications:
• Semiconductor Tools
• Tool Hook-ups
• Slurry and Aggressive Chemical Distribution Systems
• DI Water
