UHP Stainless Steel Check Valve – F9 Series | Product Series

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UHP Stainless Steel Check Valve – F9 Series

UHP Stainless Steel Check Valve – F9 Series

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Puntos de venta

The F9 Series is a high purity, all welded check valve offering high Cv up to 0.90 in a small footprint to conserve much needed panel space. The F9 is ideally suited for semiconductor fab applications, VMB/VMP, and gas cabinet manufacturers.

Especificaciones técnicas

  • Material del cuerpo: VeriClean 316L Stainless Steel
  • Material del muelle: Elgiloy, equivalent
  • Material de la junta: Fluorocarbon Elastomer (FKM), Perfluoroelastomer (FFKM)
  • Material del resorte: 316L Stainless Steel
  • Material del asiento: 316 Stainless Steel
  • Caudal: Cv: 0.45 (X 0.89) (1/4" Tube Stub) - 0.90 (X 0.78) (1/4" & 1/2" Face Seal) - 0.90 (X 0.78) (3/8" & 1/2" Tube Stub)
  • Tasa de fuga interna: Bubble Tight
  • Tasa de fuga externa: < 1 X 10-9 scc/sec He (Inboard Test Method)
  • Acabado superficial: Omit (10 Ra Passivate (std), gold label) - EP (7 Ra Electropolished, blue label)
  • Volumen: 0.14 inch3 / 2.29 cm3 (1/4" Face Seal Male)
  • Peso: 0.15 (1/4" Face Seal Male) - 0.07 (1/4" Tube Stub) lb, 2.4 (1/4" Face Seal Male) - 1.2 (1/4" Tube Stub) oz
  • Rango de presión de entrada máxima: Fluorocarbon Elastomer, FKM: 3000 | Perfluoroelastomer, FFKM: 1000 psig, 206 barg (Fluorocarbon Elastomer, FKM) - 68 barg (Perfluoroelastomer, FFKM) barg
  • Contrapresión máxima: 3,000 (Fluorocarbon Elastomer, FKM); 1,000 (Perfluoroelastomer, FFKM) psig, 206 barg (Fluorocarbon Elastomer, FKM) - 68 barg (Perfluoroelastomer, FFKM) barg
  • Presión de fisuración: 0.13 bar, 2 psi
  • Presión de restablecimiento: ≤ 2 psig, ≤ 0.13 barg
  • Temperatura máxima de funcionamiento: 66 °C, 150 °F
  • Temperatura mínima de funcionamiento: -23 °C, -10 °F

Descripción completa del producto

Parker Veriflo Division’s F9 Series UHP Check Valve offers improved performance and compatibility featuring a patented asymmetric spring design for a consistently quiet operation and a lower flow restriction compared to competition. The F9’s two seal materials meet all Semi gas compatibility requirements, reducing customer inventories and meeting a wider range of applications. Assembled and packaged in a Class 100 clean room, the F9 is designed for use in ultrahigh purity semiconductor applications.

Markets:
• Semiconductor Fab
• Gas Companies

Features/Benefits:
• Noise Free Operation with the patented asymmetric spring design
• Welded design reduces footprint
• Two seal offerings to meet all SEMI gas compatibility requirements
• Class 100 clean room assembled and packaged
• Electropolished (EP) version for Ultra High Purity applications available
• VeriClean™ 316L Stainless Steel enhances electropolishing and corrosion resistance

Applications:
• Valve Manifold Boxes/Panels
• Gas Cabinets
• Gas Sticks
• Tool Hook-Up

Documentos relacionados

Literature and Reference Materials
Veriflo Product Selection & Operation Safety Guide
Veriflo--F9 Series - Technical Data Sheet
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