The Parker Veriflo Division BFR5K Series is a stainless steel pressure regulator with a balanced poppet and sensing bellows ideally suited for use in high-flow UHP semiconductor manufacturing applications, including bulk and specialty gas delivery systems.
The regulator’s unique patented design features a balanced poppet that minimizes supply pressure effect, thus ensuring stable outlet pressure regardless of inlet (upstream) pressure changes. The sensing bellows design reduces delivery pressure drop during high flow demand. The poppet is also tied to the sensing bellows which enhances safety by improving shutoff thereby reducing the risk of high-pressure build-up down steam. Particle generation and entrapment is minimized by eliminating the poppet spring and seat retention threads which further improves process cleanliness and purging performance.
The BFR5K Series wetted components are fabricated from specialty metals to provide exceptional corrosion resistance and leak integrity. The body, poppet and trim are Vericlean™ 316L stainless steel. Vericlean™ is Parker’s proprietary UHP grade stainless steel. The body is internally electropolished to further enhance cleanliness and corrosion resistance. Bellows are made from Inconel® 718 and 321 stainless steel to provide corrosion resistance and outstanding cycle life. The seat is PCTFE and internal seals are available in FKM or EPDM to allow compatibility with many bulk delivery gases. These materials, combined with the BFR5K Series unique design features, afford the BFR5K Series excellent corrosion resistance and maximum cycle life at inlet pressures up to 500 psig.
The BFR5K regulator can be supplied with various connection types, including a 3/4 or 1 inch face seal, or a 3/4, 1 or 1-1/2 inch tube stub. It is capable of operating at flows ranging from 100 up to 5,000 standard liters per minute (slpm). Manual and dome-loaded configurations are available depending on system requirements. Dome-loaded regulators can be operated remotely.
The leak integrity of all BFRK Series regulators is verified by production tests. The external seals are inboard Helium leak tested using a mass spectrometer. The seat is tested bubble tight with pressure.
Markets:
• Fluid & gas handling
• Process control
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial
Features/Benefits:
• Offers extremely high flow in a light weight compact package
• Capable of operating at flows ranging from 100 to 5,000 slpm
• Balanced poppet design reduces supply pressure effect
• Can be supplied with various connection types, including a 3/4 or 1 inch face seal, or a 3/4, 1 or 1-1/2 inch tube stub.
• Standard full internal electropolish
• Maximum inlet pressure: 500 psig
• Internally springless and threadless design minimizes particle generation and gas entrapment
• Tied poppet enhances safety
• Internal leak rate: bubble tight
• External leak rate: <1 x 10-9 scc/sec He
Applications:
• Corrosive and specialty gases
• Gas distribution systems
• Bulk Specialty Gas Systems (BSGS)
VeriClean™ is a trademark of Parker Hannifin Corporation
Inconel® is a registered trademark of Special Metal Corporation
