UHP Bulk Diaphragm Valve — BDV Series | Product Series

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UHP Bulk Diaphragm Valve — BDV Series

UHP Bulk Diaphragm Valve — BDV Series

Puntos de venta

The BDV Series is a "positive retraction" diaphragm valve that enables precise control of gas and liquid distribution in semiconductor manufacturing processes.

Especificaciones técnicas

  • Material del cuerpo: 316L Stainless Steel
  • Materiales del diafragma: 316L Stainless Steel
  • Material del asiento: PCTFE (std), Polyimide
  • Material del vástago: 416 Stainless Steel
  • Material del mando: ABS (std), Aluminum (high temperature)
  • Presión de rotura: 900 psig, 62 barg
  • Presión de prueba: 450 psig, 31 barg
  • Caudal: 2.8 Cv
  • Tasa de fuga interna: ≤ 1 x 10-9 scc/sec He
  • Tasa de fuga externa: ≤ 2 x 10-10 scc/sec He Inboard, ≤ 1 x 10-9 scc/sec He Outboard
  • Acabado superficial: 10 micro inch Ra (Standard)
  • Rango de presión de entrada máxima: 300 psig, 21 barg
  • Temperatura máxima de funcionamiento: 150°F (PCTFE), 302°F (Polyimide) °F, 66°C (PCTFE), 150°C (Polyimide) °C
  • Temperatura mínima de funcionamiento: -40 °F, -40 °C

Descripción completa del producto

The BDV Series diaphragm valve enables precise control of gas and liquid distribution in semiconductor manufacturing processes.


The BDV is a positive retraction diaphragm valve that features a flexible tied-diaphragm design to control flow of the media. When the valve is actuated, the diaphragm moves up or down. In the open position, the diaphragm lifts, allowing the media to flow. In the closed position, it seals against a valve seat, stopping the flow.


All BDV Series valves are cleaned to exacting semiconductor industry requirements and assembled in class 100 cleanroom environments. Prior to shipping, all valve seals (seat and diaphragm) are 100% Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
•Fluid & gas handling
•Process control
•Semiconductor
•Analytical Laboratory
•Pharmaceutical
•BioPharm
•Aerospace
•Industrial


Applications:
•Semiconductor Sub-Fab gas lateral systems
•Bulk Gas Delivery
•Tool Hook-ups
•Valve Manifold Boxes (VMBs)


Features and Benefits:
•Ideal for high-flow, low-pressure applications
•Standard surface finish of 10 micro inch Ra
•Fully functional from vacuum to 300 psig
•Minimal particle generation and gas entrapment
•Metal-to-metal external seal
•Tied diaphragm eliminates springs in wetted area and enhances safety
•Internal leak rate: ≤ 1 x 10-9 scc/sec He
•Internal leak rate: ≤ 2 x 10-10 scc/sec He
•Flow rate: 2.8

Documentos relacionados

Literature and Reference Materials
BDV Series Product Card
UHP Bulk Diaphragm Valve BDV Series
Veriflo Product Selection & Operation Safety Guide
Product Demos & Tutorials
Veriflo BDV Series Valves Product Video
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