The mSR 80 is a miniature, high precision linear positioner which uses dual precision grade square rails for its guidance, and an ironcore linear motor for its drive. The mSR 80 has an extremely compact design – measuring just 80 mm in width by 25 mm in height. Captured within this miniature profile is the stage's guidance, linear motor, linear encoder, as well as adjustable limit and home sensors – making this an ideal positioner for space restricted applications in the life sciences or optics market. The mSR 80 can easily be configured into multi-axis configurations.
Markets:
• Life Science
• Electronics manufacturing
• Semiconductor
• Optics
Features/Benefits:
• Frame width of 80 mm
• Five standard strokes of 25, 35, 50, 100, and 150 mm
• Positional repeatability of +/- 0.1 micron
• Integrated magnetic (1.0 micron), optical (1.0, 0.1, 0.01 micron), or an analog Sine/Cosine encoder options
• Maximum speeds of 2000 mm/sec
• Optional 4 or 8 pole linear motor drivetrain options
• Maximum payload 78 N
• Maximum thrust of 24 N
• Integrated and adjustable home and limit sensing
• Standard multi-axis configurations available
• Laser test data with slope correction values with each precision grade stage
Applications:
• Cleanroom
• Metrology
• Move/Transport
• Focusing
