The mSR 100 is a miniature, high precision linear positioner which uses dual precision grade square rails for its guidance, and an ironless linear motor for its drive. The mSR 100 has an extremely compact design – measuring just 100 mm in width by 35 mm in height. Captured within this miniature profile is the stage's guidance, linear motor, linear encoder, as well as adjustable limit and home sensors – making this an ideal positioner for space restricted applications in the life sciences or optics market. The mSR 100 can easily be configured into multi-axis configurations.
Markets:
• Life Science
• Electronics manufacturing
• Semiconductor
• Optics
Features/Benefits:
• Frame width of 100 mm
• Standard strokes from 25 mm to 500 mm of stroke
• Positional repeatability of +/- 0.1 micron
• Integrated magnetic (1.0 micron), optical (1.0, 0.1, 0.01 micron), an analog Sine/Cosine, or a BiSS-C Absolute encoder options
• Maximum speeds of 3000 mm/sec
• Optional 3 or 5 pole linear motor drivetrain options
• Maximum payload 117 N
• Maximum thrust of 50 N
• Integrated and adjustable home and limit sensing
• Standard multi-axis configurations available
• Laser test data with slope correction values with each precision grade stage
Applications:
• Cleanroom
• Metrology
• Move/Transport
• Focusing
